Device for detecting vibration characteristics of static pressure gas bearing

Abstract

The invention discloses a device for detecting vibration characteristics of a static pressure gas bearing. A distance between a static pressure gas bearing (5) and an upper surface of a base (1) is controlled by adjusting a speed reducer (14) and a lead screw (12); air pressure distribution inside the static pressure gas bearing (5) is measured by a film pressure sensor (22); the thickness of an air film is measured by a displacement sensor (23); air pressure inside an air cavity (16) is measured by an air cavity pressure gage (10) which is arranged on an air cavity air inlet pipe (8); the air supply pressure of the static pressure gas bearing (5) is measured by a bearing pressure gage (4) which is arranged on a bearing air inlet pipe (3); and the vibration characteristics of the static pressure gas bearing (5) are measured by a laser interferometer (20). By the device, air pressure change inside the static pressure gas bearing and the vibration characteristics of the static pressure gas bearing can be detected under different air supply pressures and different thicknesses of the air film, so that the vibration characteristics of the static pressure gas bearing are detected, and the structural parameters of the bearing are optimized.

Description

Technical field: [0001] The invention relates to a detection device for the vibration characteristics of a static pressure air bearing, which belongs to the field of performance detection of precision equipment. Background technique: [0002] Hydrostatic air bearings are widely used in the field of microelectronics manufacturing and measurement because of their excellent performances such as high precision, no friction, no wear, no maintenance, strong environmental adaptability, and no crawling and hysteresis at low speeds. By optimizing the structural parameters and the corresponding position servo control system, the positioning accuracy of the air bearing platform has reached the nanometer level, the maximum acceleration exceeds 10g, and the stroke is greater than 1000mm, which meets the requirements of many microelectronics manufacturing and measurement equipment for motion positioning carriers. [0003] Affected by many factors such as throttling form, air film thicknes...

AI Technical Summary

Problems solved by technology

If the vibration frequency falls within the control bandwidth, which is equivalent to a disturbance outside the closed loop, the control system has little suppression effect on it, and once the system is enabled, the vibration will be amplified, greatly reducing the control accuracy

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