Device for detecting vibration characteristics of static pressure gas bearing

A technology of vibration characteristics and detection devices, which is applied in the directions of measuring devices, vibration testing, and testing of machine/structural components, etc. It can solve the problems of small inhibition of the control system, vibration amplification, and reduced control accuracy, and achieves simple structure and easy implementation. , Ease of use

Inactive Publication Date: 2013-03-20
CHINA JILIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the vibration frequency falls within the control bandwidth, which is equivalent to a disturbance outside the closed loop, the control system has little suppression effect on it, and once the system is enabled, the vibration will be amplified, greatly reducing the control accuracy

Method used

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  • Device for detecting vibration characteristics of static pressure gas bearing
  • Device for detecting vibration characteristics of static pressure gas bearing

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Embodiment Construction

[0012] The thin-film pressure sensor 22 of the present invention is fixed on the base 1, the bearing pressure regulating valve 2 and the bearing pressure gauge 4 are installed on the bearing intake pipe 3, the bearing fixture 7 is installed on the static pressure air bearing 5 through the pressure plate 6, and the bearing The connecting piece 19 is installed on the bearing fixing piece 7, the air chamber body 16 is connected with the bearing connecting piece 19 through the limit bolt 11, the air chamber inlet pipe 8 is connected with the air chamber body 16, the air chamber pressure regulating valve 9 and the air chamber pressure The meter 10 is installed on the air cavity intake pipe 8, the piston 18 is located at the lower part of the air cavity body 16, the air cavity body 16 is installed on the lead screw 12, the lead screw 12 is installed at the lower part of the frame 13, and the reducer 14 is installed on the frame 13, the output shaft of the speed reducer 14 is connecte...

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Abstract

The invention discloses a device for detecting vibration characteristics of a static pressure gas bearing. A distance between a static pressure gas bearing (5) and an upper surface of a base (1) is controlled by adjusting a speed reducer (14) and a lead screw (12); air pressure distribution inside the static pressure gas bearing (5) is measured by a film pressure sensor (22); the thickness of an air film is measured by a displacement sensor (23); air pressure inside an air cavity (16) is measured by an air cavity pressure gage (10) which is arranged on an air cavity air inlet pipe (8); the air supply pressure of the static pressure gas bearing (5) is measured by a bearing pressure gage (4) which is arranged on a bearing air inlet pipe (3); and the vibration characteristics of the static pressure gas bearing (5) are measured by a laser interferometer (20). By the device, air pressure change inside the static pressure gas bearing and the vibration characteristics of the static pressure gas bearing can be detected under different air supply pressures and different thicknesses of the air film, so that the vibration characteristics of the static pressure gas bearing are detected, and the structural parameters of the bearing are optimized.

Description

Technical field: [0001] The invention relates to a detection device for the vibration characteristics of a static pressure air bearing, which belongs to the field of performance detection of precision equipment. Background technique: [0002] Hydrostatic air bearings are widely used in the field of microelectronics manufacturing and measurement because of their excellent performances such as high precision, no friction, no wear, no maintenance, strong environmental adaptability, and no crawling and hysteresis at low speeds. By optimizing the structural parameters and the corresponding position servo control system, the positioning accuracy of the air bearing platform has reached the nanometer level, the maximum acceleration exceeds 10g, and the stroke is greater than 1000mm, which meets the requirements of many microelectronics manufacturing and measurement equipment for motion positioning carriers. [0003] Affected by many factors such as throttling form, air film thicknes...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M7/02
Inventor 李运堂袁柯铭蔺应晓楼晓春
Owner CHINA JILIANG UNIV
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