An ion implanter robotic arm loading and unloading tray
A technology of ion implanter and robotic arm, which is applied in the direction of conveyor objects, transportation and packaging, etc., which can solve the problems of difficult operation, excessive manpower and time, and inability to ensure the accuracy of disassembly and assembly, and achieve the effect of saving manpower and time
Active Publication Date: 2011-12-07
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP +1
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Problems solved by technology
[0007] The technical problem to be solved by the present invention is to provide a loading and unloading tray for the mechanical arm of an ion implanter, so as to solve the problem that the existing manual disassembly and assembly of the mechanical arm requires a lot of manpower and time, and it is difficult to operate and cannot ensure the disassembly and assembly. precision problem
Method used
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[0018] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0019] The loading and unloading tray of the ion implanter manipulator described in the present invention can be realized in various alternative ways. The following is a description of a preferred embodiment. Of course, the present invention is not limited to this specific embodiment. Those of ordinary skill in the art Known general substitutions are undoubtedly covered within the protection scope of the present invention.
[0020] Secondly, the present invention is described in detail using schematic diagrams. When describing the embodiments of the present invention in detail, for the sake of illustration, the schematic diagrams are not partially enlarged according to the general scale, which should not be used as a limitation of the p...
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The invention provides a loading and unloading pallet of a mechanical arm of an ion implanter. The loading and unloading pallet comprises a bottom pallet, a middle pallet and a top pallet, wherein the bottom pallet, the middle pallet and the top pallet are sequentially connected through at least two lead screws with threads on the surfaces of the lead screws; and the middle pallet can move up anddown along the lead screws. According to the loading and unloading pallet provided by the invention, the mechanical arm cannot be damaged during the processes of assembly and disassembly, at the sametime, the hazard of vacuum leakage does not exist when the mechanical arm is installed on a technological cavity, and during the installation process, the mechanical arm can be ensured to be installed in a certain track and to be stably combined with the technological cavity. Meanwhile, under the assistance of the loading and unloading pallet provided by the invention, the mounting and dismounting of fixed nuts on the mechanical arm are more convenient, and manpower and time required by assembly and disassembly of the mechanical arm can be greatly saved during the whole process of assembly and disassembly.
Description
technical field [0001] The invention relates to the technical field of ion implantation in semiconductor manufacturing, in particular to an ion implanter mechanical arm loading and unloading trays. Background technique [0002] In the field of semiconductor manufacturing, the ion implantation process uses an ion implanter to inject ions into the target target through high pressure. In ion implanters, robotic arms are used to transport wafers from the sample chamber to the process chamber. The wafer is placed on the input rack and sent into the sampling chamber to be sealed. The sampling chamber is evacuated to a high vacuum by the pump, and then the isolation valve is opened, and the mechanical arm sends the wafer into the process chamber. In the process chamber, the ion beam achieves Ion implantation of wafers. It can be seen that the robotic arm is very important in the process of transferring wafers. During the annual maintenance of the ion implanter, the robotic arm mu...
Claims
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Inventor 许鹖
Owner SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP