Acoustic-optical frequency shifter for singlechip integrated optical gyro
An acousto-optic frequency shifter and optical gyroscope technology, which is applied in the field of integrated optics, can solve the problems of large optical waveguide loss, the inability to achieve single-chip integration of optical gyroscopes, and hinder the development of high-precision and miniaturized optical gyroscope technology. Effect of Accuracy Improvement
Inactive Publication Date: 2012-12-12
CHANGCHUN UNIV OF SCI & TECH
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Problems solved by technology
The LiNbO used in this acousto-optic frequency shifter 3 The optical waveguide loss of the waveguide material is relatively large, thereby reducing the performance of the IOG; again, due to the LiNbO 3 The substrate is a dielectric material, which makes it impossible to use it as a substrate to make a light source, thus making it impossible to achieve complete monolithic integration of optical gyroscopes
All these hinder the development of optical gyroscope technology to the direction of high precision and miniaturization
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[0011] The specific scheme of the acousto-optic frequency shifter for the monolithic integrated optical gyroscope of the invention is as follows, see figure 1 , figure 2 As shown, the optical waveguide and the transducer are located on the substrate. The diffractive channel 1 and the non-diffraction channel 2 of the optical waveguide intersect at a deflection angle Φ to form an optical channel intersection area 3 . The transducer is located on the side where the diffraction channel 1 intersects with the non-diffraction channel 2; the acoustic aperture of the transducer faces the intersection area 3 of the optical channel, and the axis of the acoustic aperture and the axis of the non-diffracting channel 2 form a Bragg angle θ B The supplementary angle of , the width L of the acoustic aperture is equal to the width W of the intersection area of the optical channel. The substrate is Si substrate 4, SiO 2 Lower cladding layer 5 is located on Si substrate 4 . With Ge-SiO 2 ...
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The invention discloses an acoustic-optical frequency shifter for a singlechip integrated optical gyro and belongs to the integrated optical technical field. The light waveguide loss of the conventional acoustic-optical frequency shifter made of a LiNbO3 waveguide material is relatively greater; as a LiNbO3 base sheet is a dielectric medium material, a light source cannot be manufactured by usingthe LiNbO3 base sheet as the base sheet, so complete singlechip integration of the optical gyro cannot be realized. The acoustic-optical frequency shifter is characterized in that: a substrate is a Si substrate; a SiO2 lower cladding is positioned on the Si substrate; a diffraction channel with a Ge-SiO2 core layer and a non-diffraction channel are positioned on the SiO2 lower cladding; the section of the Ge-SiO2 core layer is in a rectangular shape; a SiO2 upper cladding covers the Ge-SiO2 core layer and a part, which is not occupied by a Ge-SiO2 light waveguide, of the upper surface of the SiO2 lower cladding; a transducer consists of a ZnO piezoelectric membrane and an interdigital bottom electrode and is positioned on the SiO2 upper cladding; the thickness of the ZnO piezoelectric membrane is equal to the wavelength of 0.4 surface acoustic wave; and the interdigital bottom electrode is positioned at the bottom of the transducer.
Description
technical field [0001] The invention relates to an acousto-optic frequency shifter for a monolithic integrated optical gyroscope, in particular to a Si-based SiO 2 An optical waveguide and a ZnO piezoelectric film interdigital transducer structure belong to the technical field of integrated optics. Background technique [0002] In recent years, with the advancement of integrated optics and optoelectronics technology, the inertial instrument optical gyro technology has developed towards high precision and miniaturization. With this development, the third generation of optical gyroscopes, namely IOG (Integrated Optical Gyroscope), has emerged. IOG consists of sensitive components, control components and light sources. The sensitive element is a passive ring resonator fabricated on a silicon chip, and the control element is a frequency shifter. The existing IOG is actually just a combination of discrete sensitive components and control components to form a miniaturized optica...
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IPC IPC(8): G02F1/125G01C19/72
Inventor 陈晨石邦任赵猛郭丽君张荣
Owner CHANGCHUN UNIV OF SCI & TECH