A device and process for storing and recycling chlorosilane

Abstract

The invention discloses a device for storing and cyclically recovering chlorsilane and a process for cyclically recovering the chlorsilane. The device for storing the chlorsilane comprises a chlorsilane storing tank and a condenser, wherein a chlorsilane gas pipeline and a chlorsilane condensate liquid backflow pipe are arranged between the chlorsilane storing tank and the condenser, a pneumatic switch valve is arranged on the chlorsilane gas pipeline, a buffer tank, a filter and a pneumatic regulating valve are additionally arranged between the chlorsilane condensate liquid backflow pipe anda chlorsilane condensate liquid pipe of the condenser, a gas return pipe is also arranged between the top of the buffer tank and a gas phase inlet of the condenser, the outlet part of the chlorsilanecondensation pipe is provided with a signal receiver, and the signal receiver is in signal connection with the pneumatic switch valve and the pneumatic regulating valve through a controller. The device and the process have the advantages that through closing the pneumatic regulating valve and blocking the filter, leaked cooling circulation water can be effectively prevented from entering the chlorsilane storing tank and from reacting with chlorsilane, and the occurrence of serious safety accidents is prevented.

Description

technical field [0001] The invention discloses a device for preventing cooling circulating water from entering a chlorosilane storage tank, in particular to a method and a device for preventing cooling circulating water from entering a chlorosilane storage tank when the condenser on the chlorosilane storage tank leaks, and belongs to polysilicon production technology field. Background technique [0002] In the production of polysilicon, the purification of the intermediate product chlorosilane is a very important link in the production of polysilicon, which involves a large number of chlorosilane storage tanks. Due to the low boiling point of chlorosilane, a condenser with circulating water as a refrigerant is installed on the top of the chlorosilane storage tank to condense the vaporized chlorosilane vapor and return it to the storage tank to avoid loss of chlorosilane. Due to the corrosion of chlorosilane to the heat exchange tube of the condenser, the material of the co...

AI Technical Summary

Problems solved by technology

At present, the recovery of chlorosilane condensate generally adopts the method of directly returning to the storage tank. When the condenser leaks, a large amount of cooling circulating water enters the chlorosilane storage tank and reacts with a large amount of chlorosilane. A large amount of heat and hydrogen are generated, which is prone to explosion and causes major safety accidents

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