A device and process for storing and recycling chlorosilane

A technology of recycling and chlorosilane, which is applied in gas/liquid distribution and storage, pipeline system, mechanical equipment, etc., and can solve problems such as explosion-prone

Inactive Publication Date: 2011-12-21
SICHUAN XINGUANG SILICON TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the recovery of chlorosilane condensate generally adopts the method of directly returning to the storage tank. When the condenser leaks, a large amount of cooling circulating water en

Method used

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  • A device and process for storing and recycling chlorosilane
  • A device and process for storing and recycling chlorosilane

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Embodiment

[0033] Example: such as figure 1As shown, the device for preventing the cooling circulating water from entering the chlorosilane storage tank and recycling chlorosilane listed in the present invention includes a chlorosilane storage tank 1 and a condenser 4, and the cooling circulating water inlet pipe 5 is arranged on the condenser 4 , cooling circulating water outlet pipe 6 and chlorosilane condensate pipe 7, non-condensable tail gas outlet 15, chlorosilane gas pipeline 2 and chlorosilane condensate return pipe 11 are arranged between chlorosilane storage tank 1 and condenser 4, chlorosilane The gas pipeline 2 is also provided with a pneumatic switching valve 3, and a buffer tank 8, a filter 9, and a pneumatic regulating valve 10 are also arranged between the chlorosilane condensate pipe 7 and the chlorosilane condensate return pipe 11, and the buffer tank 8 is a storage tank with a diameter of 200mm. The chlorosilane condensate pipe 7 extends into the bottom of the buffer ...

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Abstract

The invention discloses a device for storing and cyclically recovering chlorsilane and a process for cyclically recovering the chlorsilane. The device for storing the chlorsilane comprises a chlorsilane storing tank and a condenser, wherein a chlorsilane gas pipeline and a chlorsilane condensate liquid backflow pipe are arranged between the chlorsilane storing tank and the condenser, a pneumatic switch valve is arranged on the chlorsilane gas pipeline, a buffer tank, a filter and a pneumatic regulating valve are additionally arranged between the chlorsilane condensate liquid backflow pipe anda chlorsilane condensate liquid pipe of the condenser, a gas return pipe is also arranged between the top of the buffer tank and a gas phase inlet of the condenser, the outlet part of the chlorsilanecondensation pipe is provided with a signal receiver, and the signal receiver is in signal connection with the pneumatic switch valve and the pneumatic regulating valve through a controller. The device and the process have the advantages that through closing the pneumatic regulating valve and blocking the filter, leaked cooling circulation water can be effectively prevented from entering the chlorsilane storing tank and from reacting with chlorsilane, and the occurrence of serious safety accidents is prevented.

Description

technical field [0001] The invention discloses a device for preventing cooling circulating water from entering a chlorosilane storage tank, in particular to a method and a device for preventing cooling circulating water from entering a chlorosilane storage tank when the condenser on the chlorosilane storage tank leaks, and belongs to polysilicon production technology field. Background technique [0002] In the production of polysilicon, the purification of the intermediate product chlorosilane is a very important link in the production of polysilicon, which involves a large number of chlorosilane storage tanks. Due to the low boiling point of chlorosilane, a condenser with circulating water as a refrigerant is installed on the top of the chlorosilane storage tank to condense the vaporized chlorosilane vapor and return it to the storage tank to avoid loss of chlorosilane. Due to the corrosion of chlorosilane to the heat exchange tube of the condenser, the material of the co...

Claims

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Application Information

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IPC IPC(8): F17D1/08
Inventor 唐猷成王恒孝黎展荣蒲晓东
Owner SICHUAN XINGUANG SILICON TECH
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