Device for storing and cyclically recovering chlorsilane and process
A cyclic recovery, chlorosilane technology, applied in gas/liquid distribution and storage, pipeline systems, mechanical equipment, etc., can solve problems such as easy explosion
Inactive Publication Date: 2013-06-12
SICHUAN XINGUANG SILICON TECH
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Problems solved by technology
At present, the recovery of chlorosilane condensate generally adopts the method of directly returning to the storage tank. When the condenser leaks, a large amount of cooling circulating water enters the chlorosilane storage tank and reacts with a large amount of chlorosilane. A large amount of heat and hydrogen are generated, which is prone to explosion and causes major safety accidents
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[0033] Example: such as figure 1As shown, the device for preventing the cooling circulating water from entering the chlorosilane storage tank and recycling chlorosilane listed in the present invention includes a chlorosilane storage tank 1 and a condenser 4, and the cooling circulating water inlet pipe 5 is arranged on the condenser 4 , cooling circulating water outlet pipe 6 and chlorosilane condensate pipe 7, non-condensable tail gas outlet 15, chlorosilane gas pipeline 2 and chlorosilane condensate return pipe 11 are arranged between chlorosilane storage tank 1 and condenser 4, chlorosilane The gas pipeline 2 is also provided with a pneumatic switching valve 3, and a buffer tank 8, a filter 9, and a pneumatic regulating valve 10 are also arranged between the chlorosilane condensate pipe 7 and the chlorosilane condensate return pipe 11, and the buffer tank 8 is a storage tank with a diameter of 200mm. The chlorosilane condensate pipe 7 extends into the bottom of the buffer ...
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The invention discloses a device for storing and cyclically recovering chlorsilane and a process for cyclically recovering the chlorsilane. The device for storing the chlorsilane comprises a chlorsilane storing tank and a condenser, wherein a chlorsilane gas pipeline and a chlorsilane condensate liquid backflow pipe are arranged between the chlorsilane storing tank and the condenser, a pneumatic switch valve is arranged on the chlorsilane gas pipeline, a buffer tank, a filter and a pneumatic regulating valve are additionally arranged between the chlorsilane condensate liquid backflow pipe anda chlorsilane condensate liquid pipe of the condenser, a gas return pipe is also arranged between the top of the buffer tank and a gas phase inlet of the condenser, the outlet part of the chlorsilanecondensation pipe is provided with a signal receiver, and the signal receiver is in signal connection with the pneumatic switch valve and the pneumatic regulating valve through a controller. The device and the process have the advantages that through closing the pneumatic regulating valve and blocking the filter, leaked cooling circulation water can be effectively prevented from entering the chlorsilane storing tank and from reacting with chlorsilane, and the occurrence of serious safety accidents is prevented.
Description
Technical field [0001] The present invention disclosed a device that prevents cooling circulating water from entering the chlorilagene storage tank, which involves a method and device that prevent cooling circulating water from entering the chlorilacetne storage tank when the condenser leakage of the condenser on the chlorilarine storage tank.Technical field. Background technique [0002] In the production of polycrystalline silicon, the purity of chlorilaine in the middle product is a very important link in polysilicon production, which involves a large amount of chlorilane storage tank.Due to the low boiling point of chloropene, it is provided with a condenser for a refrigerant at the top of the chlorilatane storage tank to condense the vaporized chlorilane steam steam to the storage tank to avoid losses of chlorilane.Due to the corrosion of the chlorilagene on the heating tube of the condenser, the material and processing quality of the condenser, and the processing quality of...
Claims
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IPC IPC(8): F17D1/08
Inventor 唐猷成王恒孝黎展荣蒲晓东
Owner SICHUAN XINGUANG SILICON TECH