Electrostatic absorption type micro-quality sensor

A mass sensor and electrostatic adsorption technology, applied in the field of precision sensors, can solve problems such as unfixable measurement errors and dispersion of measured objects, and achieve the effects of improving measurement repeatability and accuracy, stable performance, and improving effective stiffness

Inactive Publication Date: 2012-11-14
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The present invention provides a novel electrostatic adsorption micromass sensor aiming at the measurement error caused by the dispersion and inability of the measured object to be fixed in the measurement process of the existing micromass sensor

Method used

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  • Electrostatic absorption type micro-quality sensor
  • Electrostatic absorption type micro-quality sensor
  • Electrostatic absorption type micro-quality sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] figure 1 A structural schematic diagram of an electrostatic adsorption micromass sensor is given, in which the multi-layer trapezoidal beam structure 6 is connected to the fixed block 5 to form a cantilever beam structure, and the upper insulating film 2 and the lower insulating film 3 are connected to the upper and lower surfaces of the conductive elastic plate 4 , by adjusting the length of the insulating film, different quality sensitive areas can be formed on the surface of the conductive elastic plate 4 . The piezoelectric film 1 is connected to the upper surface of the upper insulating film 2 to form electrical isolation with the conductive elastic plate 4, and the thickness of the upper insulating film 2 and the lower insulating film 3 is relatively large, so that the electrostatic adsorption force is smaller than the inertia of the measured object force. During the measurement process of the sensor, relying on the electrostatic adsorption of the conductive elas...

Embodiment 2

[0033] image 3A structural schematic diagram of another electrostatic adsorption micromass sensor is given. Aiming at the micromass measurement of tiny measured objects with conductive properties, on the basis of the first embodiment, the upper insulating film 2 is completely covered on the upper surface of the conductive elastic plate 4, and the lower insulating film 3 forms a fully enclosed electrostatic adsorption device. Wherein, the thickness of the lower insulating film 3 is three times that of the upper insulating film 2, so that the conductive measured object can be effectively adsorbed on the sensitive area of ​​the trapezoidal cantilever beam.

Embodiment 3

[0035] Figure 4 A structural schematic diagram of another electrostatic adsorption micromass sensor is shown. On the basis of Embodiment 1, let the lower insulating film 3 and the upper insulating film 2 have the same size, and partially cover the conductive elastic plate 4, the upper and lower surfaces of the sensitive area of ​​the conductive elastic plate 4 can absorb tiny measured objects, and the two layers of insulation The thickness of the film can make the electrostatic force generated by the conductive elastic plate 4 smaller than the inertial force of the tiny measured object. In addition, in this embodiment, the lower piezoelectric film 7 and the upper piezoelectric film 1 form a dual piezoelectric measurement to obtain higher sensitivity.

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Abstract

The invention discloses an electrostatic absorption type micro-quality sensor, belonging to the technical field of precision sensing. A multilayer trapezoid beam of the sensor is in a cantilever beam structure, is used as a key element for micro quality measurement and is composed of an electricity conduction elastic plate, an upper insulation film, a lower insulation film and a piezoelectric film; each layer is in the same trapezoid structure; the electricity conduction elastic plate is provided with uniform charges; the micro quality is adsorbed in a corresponding measuring sensitive area according to an electrostatic force, so as to obtain the intraarea quality through resonant frequency change of a measurement structure; the trapezoid structure is used as a sensitive element, so as toimprove sensitivity of the sensor; and meanwhile, an electrostatic adsorption effect is used for causing microparticles to be fixed at a measuring sensitive end of the multilayer trapezoid beam, thusthe measurement error caused by falling off or relative vibration of an object to be measured due to the resonance of the cantilever beam is effectively avoided, and measuring accuracy and repeat reliability are improved. The electrostatic absorption type micro-quality sensor provided by the invention can be widely applied to the fields of fine grain particle weighing, hazardous chemicals, food safety testing, microorganism, bacterium or virus detection and the like.

Description

technical field [0001] The invention relates to an electrostatic adsorption micromass sensor, which belongs to the technical field of precision sensors. It is mainly used for quality measurement of microparticles, hazardous chemicals, cells and microorganisms such as bacteria or viruses. Background technique [0002] The piezoelectric resonant micro-mass sensor mainly obtains the actual mass of the attachment by measuring the change of the resonance frequency caused by the attachment in the resonance area. It has the characteristics of simple structure, fast response, low cost and high precision. It is widely used in biomedicine, environmental monitoring and food safety. The field has broad application prospects. However, in the actual measurement process, the types of measured objects are diverse, including tiny particles, cells, bacteria and viruses, etc., making the fixed problem and dispersion of small measured objects in the resonance area a factor that affects the mea...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01G3/16
Inventor 刘书田赵剑高仁璟黄毓
Owner DALIAN UNIV OF TECH
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