Two-dimensional comb actuator and manufacturing method thereof

Abstract

The invention provides a two-dimensional comb actuator and a manufacturing method thereof. The two-dimensional comb actuator comprises a bearing substrate, a frame and a movable body. The bearing substrate is provided with first comb electrodes; the frame is provided with internal comb electrodes and external comb electrodes; the external comb electrodes are crossed with the first comb electrodes; the movable body is provided with second comb electrodes which are crossed with the internal comb electrodes; the thickness of the second comb electrodes is not equal to the thickness of the internal comb electrodes correspondingly crossed with the second comb electrodes; and the thickness of the external comb electrodes is not equal to that of the first comb electrodes correspondingly crossed with the first comb electrodes. A conductive layer is arranged on the first comb electrodes, the internal comb electrodes, the external comb electrodes and the second comb electrodes to increase a rotation angle and an available frequency range.

Description

【Technical field】 [0001] The present invention relates to an actuator and its method, in particular to a two-dimensional comb actuator and its manufacturing method. 【Background technique】 [0002] In recent years, microstructural elements manufactured by MEMS technology have been widely used in various sensor or actuator fields, for example, acceleration sensors, angular velocity sensors, or vibrating mirror actuators all contain microstructural elements of different designs. [0003] refer to Figure 1A , which shows a partial cross-sectional view of an actuator 100 in the prior art. The actuator 100 includes a supporting base 102 and a vibrating element 104, the supporting base 102 has a base material 106, an insulating layer 108 and an element layer 110, the vibrating element 104 is disposed between the hollow areas of the element layer 110, and the The vibrator element 104 and the element layer 110 are co-planar (co-planar). Due to the co-planar property, the vibrator e...

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Problems solved by technology

[0007] Another object of the present invention is to provide a two-dimensional comb-shaped actuator and its manufacturing method, which can solve the problem that the actuator is difficult to start, and solve the problem that the upper and lower layer comb-shaped electrodes of the actuator are caused by using different covers. Alignment issues caused by separate etching of curtain layer patterns and further addressing the issue of improper lateral overcut of device layers using isotropic etching

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