Self-tightening type seed crystal chuck

Abstract

The invention relates to auxiliary equipment of Czochralski silicon single crystal growth equipment and aims at providing a self-tightening type seed crystal chuck. The self-tightening type seed crystal chuck comprises a sleeve and clamping pieces annularly arranged in the inner wall of the sleeve; the inner wall of the sleeve has a conicity contracted downwards towards an axle center, and the clamping pieces have an external shape cooperating with the conicity; the internal diameter of an opening at the upper end in the clamping pieces is greater than the internal diameter of an opening at the lower end in the clamping pieces, and the inner walls of the clamping pieces located between the upper opening and the lower opening transit in a conical face form. When the chuck provided in the invention is used, all the parts of the chuck are automatically strained by the gravity of seed crystals, and the weight of the seed crystals continuously increases in the process of crystal pulling, which enables a frictional force to increase continuously, thereby increasingly lowering down the possibility of skidding. Since the seed crystal chuck comprises a few parts and the construction of the chuck is utmostly simplified, the chuck is very convenient to operate during utilization.

Description

technical field [0001] The invention relates to auxiliary equipment for Czochralski silicon single crystal growth equipment, in particular to a self-tightening seed crystal chuck. Background technique [0002] During the production of the Czochralski silicon single crystal furnace, the seed crystal is fixed by the seed crystal chuck. In the prior art, there are various types of seed chucks, but all of them have the problems of complex structure and inconvenient operation. [0003] Chinese utility model patent CN201560249U discloses a seed chuck structure: a seed crystal fixing rod is provided in the conical fixing sleeve, a conical compression gasket is arranged outside the seed crystal fixing rod, and the water-cooled crystal rod is set on the seed crystal Above the fixed rod, a gasket is arranged under the water-cooled crystal rod, and a backing ring is arranged under the gasket. When the tapered fixing sleeve is tightened, the tapered compression gasket compresses the s...

AI Technical Summary

Problems solved by technology

However, the disadvantage of the structure of the seed crystal chuck is that the tightening force of the entire chuck to the seed crystal fixing rod is completed by the conical tightening gasket, which puts forward requirements on the tightening degree of the conical fixing sleeve, such as in the crystal pulling process. Loosening occurs, which is bound to cause serious production accidents

In addition, the clamp structure is still relatively complicated, and it is inconvenient to disassemble

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