Piezoelectric driven capacitance detection micro-solid modal gyroscope

Abstract

The invention discloses a piezoelectric driven capacitance detection micro-solid modal gyroscope in the field of micro-electromechanical technology. According to the invention, an elastic micro oscillator, a reference vibration induction electrode and a coriolis force induction electrode are fixed through lower surfaces; a piezoelectric actuation electrode is positioned on the upper surface of the elastic micro oscillator and forms a fixed connection with the elastic micro oscillator; and a tiny gap between the side wall of the reference vibration induction electrode and the coriolis force induction electrode and the side wall of the adjacent square elastic micro oscillator forms an interpole gap variable capacitance. Two merged special vibration modes of the elastic micro oscillator are utilized for operation with high ability of impact resistance and shake resistance; high working frequency is beneficial to increasing the measuring bandwidth of micro gyroscope and reduce noise; it is easy to package with high reliability and low production cost; the adoption of piezoelectric excitation and capacitance detection is beneficial to raising the driving force of reference vibration and simultaneously the invention is convenient to integrate, is easy for batch production and is used to reduce the influence of parasitic resistance or capacitance.

Description

technical field [0001] The invention relates to a micro-gyroscope in the field of micro-electromechanical technology, in particular to a piezoelectric-driven capacitive detection micro-solid mode gyroscope. Background technique [0002] Over the past century, gyro technology has undergone a series of revolutionary developments. At the beginning of the 20th century, Elmer Sperry invented the gyro compass and applied it in navigation. In the 1950s, the use of frame gyro and accelerometer systems to sense the six degrees of freedom of the aircraft has been realized. These early gyro systems were used for azimuth reference only, so no high accuracy requirements were placed on them. Due to the high complexity and high cost of the frame gyro system, the strapdown inertial reference system began to be developed in the 1970s. In order to obtain sufficiently high performance, the strapdown system requires high precision, and its gyro precision drift should be lower than 0.01deg / h....

AI Technical Summary

Problems solved by technology

The elasticity and micromachinability of piezoelectric ceramics are limited, and the material and electrical properties of piezoelectric ceramics are sensitive to temperature, which limits the improvement of the manufacturing accuracy of this microgyroscope. Its material selectivity is limited and microfabrication is batched. Manufacturing feasibility is not high

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