Electrostatically driven capacitively detected micro-solid modal gyroscope

Abstract

The invention discloses a static-driving capacitance-detection micro solid modal gyroscope belong to the technical field of micro electro mechanical systems, which comprises an elastic micro vibrator, and a reference vibration driving electrode, a reference vibration induction electrode, a Coriolis force induction electrode which are positioned at the periphery of the elastic micro vibrator, wherein two consolidated special vibration modes, i.e. a reference vibration mode and a sensing vibration mode, of the elastic micro vibrator are used for working, static power is adopted for driving, andvariable capacitance mechanism is used for detecting the reference vibration and Coriolis force induction vibration. The gyroscope has no independent mass spring structure so as to have the anti-impact and anti-vibration capability, can be used in the severe environment; the gyroscope has high working efficiency so as to be beneficial to enlarge the measurement bandwidth of the gyroscope and reduce noise, the gyroscope can work under the atmospheric environment so as to reduce the packaging difficulty and has improved reliability and reduced production cost; and the static exciting and the capacitance detection are adopted, so that the micro solid modal gyroscope and a CMOS (Complementary Metal-Oxide-Semiconductor Transistor) measurement and control circuit can be integrated, the batched production is easy, and simultaneously, the influence to the parasitic resistance or the capacitance can be reduced.

Description

technical field [0001] The invention relates to a micro-gyroscope in the field of micro-electromechanical technology, in particular to an electrostatically driven capacitively detected micro-solid mode gyroscope. Background technique [0002] Over the past century, gyro technology has undergone a series of revolutionary developments. At the beginning of the 20th century, Elmer Sperry invented the gyro compass and applied it in navigation. In the 1950s, the use of frame gyro and accelerometer systems to sense the six degrees of freedom of the aircraft has been realized. These early gyro systems were used for azimuth reference only, so no high accuracy requirements were placed on them. Due to the high complexity and high cost of the frame gyro system, the strapdown inertial reference system began to be developed in the 1970s. In order to obtain sufficiently high performance, the strapdown system requires high precision, and its gyro precision drift should be lower than 0.01...

AI Technical Summary

Problems solved by technology

The elasticity and micromachinability of piezoelectric ceramics are limited, and the material and electrical properties of piezoelectric ceramics are sensitive to temperature, which limits the improvement of the manufacturing accuracy of this microgyroscope. Its material selectivity is limited and microfabrication is batched. Manufacturing feasibility is not high

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