Airtight sintering device of glass tube and MEMS chip
A technology of sintering device and glass tube, which is applied in the directions of micro-structure device, manufacturing micro-structure device, decorative arts, etc., can solve the problem that the vacuum degree of vacuum micro-cavity cannot be effectively controlled, etc.
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[0021] The present invention will be described in further detail below in conjunction with specific embodiments and accompanying drawings.
[0022] The invention is an airtight sintering device for glass tubes and chips, including: 1) a main machine base and a heating furnace body, 2) a lifting pressure adjustment structure, 3) a glass tube and a vacuum connection machine structure, and other main parts. Its overall structure diagram is as figure 1 shown.
[0023] figure 1 It is a schematic view of the overall structure of the glass tube and MEMS chip airtight sintering device of the present invention. figure 1 Among them, the total thickness of the main body base (1) is 20-40mm, to ensure that the main body base (1) has sufficient strength, the heating furnace body (2) and the wiring seat (10) are connected to the main body base (1) with screws On the column (14) of the main body support (1), a lifting regulator (22) and a shut-off valve (24) are connected with a fixed han...
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