Tracking system of large-angle fast steering mirror

A tracking system and reflector technology, applied in the direction of control, installation, optics, etc. using feedback, can solve problems such as system complexity, affecting beam quality and detection accuracy
CN102368162AActive Publication Date: 2012-03-07INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
Publication Date
2012-03-07

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Abstract

The invention discloses a tracking system of a large-angle fast steering mirror. The tracking system realizes a large-angle high-precision tracking function by using a high-resolution and small-angle fast steering mirror M1 and a low-resolution and large-angle fast steering mirror M2. A control method is as follows: the closed loops of the two fast steering mirrors M1 and M2 are realized in the same optical path by using position information provided by a position detector; the two fast steering mirrors M1 and M2 deflect, but do not couple; two control ways can be adopted, wherein the first way is as follows: M1 carries out closed loop by directly using position deviation provided by a CCD (Charge Coupled Device), and a closed loop signal of M2 is the sum of the position deviation and a deflection angle of M1; the second way is as follows: the closed loop signal of M2 is the deflection angle of M1. Large-angle (namely the maximum intersection angle of M2) and high-precision tracking can be realized no matter which scheme is adopted. The control method provided by the invention enables the tracking system to be simple and can be used for improving the beam quality and the detectionprecision.
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Description

technical field

[0001] The invention relates to the field of light beam control, in particular to a large-angle fast mirror tracking system, which can be used in a high-precision tracking system. Background technique

[0002] In many precision beam correction fields, both large-angle deflection and high-precision tracking are required, which requires fast mirrors with high closed-loop bandwidth and large-angle deflection. It is usually difficult to meet this requirement with a fast reflector. This is mainly due to the limitation of the driving mechanism of the fast mirror: the mirror driven by piezoelectric ceramics has a high response frequency and can achieve high bandwidth, but the rotation angle is limited; the mirror driven by a voice coil motor has a large range of rotation angle, but the response frequency is low, making it difficult to achieve high bandwidth.

[0003] If the above two types of mirrors are combined in the optical path, the current method is to place...

Claims

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