Light emitting diode chip without wire bonding and preparation method thereof
A light-emitting diode and chip technology, applied to electrical components, circuits, semiconductor devices, etc., can solve problems such as high working voltage, fast light decay, and failure to connect to the line, so as to reduce the consumption of gold wires, avoid wire bonding processing, and simplify Effect of Package Soldering Process
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[0031] The fabrication, packaging and welding of the above-mentioned gallium nitride-based light-emitting diode chip on the sapphire substrate without wire bonding is realized by the following scheme.
[0032] The fabrication steps of the gallium nitride-based light-emitting diode chip on the sapphire substrate are as follows:
[0033] Step 1: Etching a P-region step on the GaN epitaxial wafer.
[0034] Step 2: making a protective layer on the gallium nitride epitaxial wafer, exposing part of the N region, and then using one or more laser beams to draw parallel lines in the exposed area. The sapphire substrate is then etched in a mixture of phosphoric acid and sulfuric acid at 270°C to obtain a V-shaped inclined side. Wherein, the laser only scribes the chip boundary in a certain direction, preferably the long side direction.
[0035] Step 3: making a transparent conductive layer, preferably made of indium tin oxide (ITO).
[0036] Step 4: Evaporate an insulating layer at t...
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