Non-contact micro displacement measuring device and method based on linear array CCD (charge coupled device)

Abstract

The invention provides a non-contact micro displacement measuring device and method based on a linear array CCD (charge coupled device). Laser emitted by a horizontal linear laser is irradiated on the linear array CCD, and a light sensing pixel outputs a signal under the action of a drive pulse; when the output signal exceeds a set background threshold voltage, a threshold comparator outputs rectangular pulse strings; and after the rectangular pulse strings at different moments are processed, the central positions of the rectangular pulse strings are respectively obtained, thus obtaining the absolute displacement of the linear array CCD between different moments. The number of rectangular pulse signals output by a threshold adjuster is determined by the comparison result of the threshold voltage and the output signal voltage of the linear array CCD; and a central processing unit is mainly used for concerning the number of the rectangular pulse signals output by the threshold adjuster, therefore the device provided by the invention facilitates the process control regulation, is high in precision and small in noise, can store optimal operating point data output by a digital potentiometer, and provides data supports for regulating the output of the digital potentiometer in different environments.

Description

technical field [0001] The invention relates to a measuring device and a method, a device and a method for real-time monitoring of a small displacement or deformation of a device to be measured, in particular to a data acquisition system and channel expansion technology of the measuring device. Background technique [0002] The measurement of displacement and deformation plays an increasingly important role in many application fields such as surface measurement, material measurement, and precision mechanical measurement. To measure displacement or deformation, contact measurement method and non-contact measurement method can be used. The traditional contact measurement method has many limitations, and it is difficult to achieve high-precision detection of small displacements; the non-contact measurement method has the characteristics of simple device structure, fast speed, high measurement accuracy, convenient and flexible application, etc. widely. [0003] Most of the exi...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a real-time measurement and display, maximum support of 256 nodes, measurement parameters can be set, data can be transmitted over a long distance, a non-contact micro-displacement measurement device and method based on a linear array CCD, which solves the problems of existing methods and The device is not easy to expand, does not support multi-station, measurement data cannot be transmitted over long distances and other technical problems

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