Uniform gas flow gas inlet device and uniform gas inlet method for vapor deposition

Abstract

The invention discloses a uniform gas flow gas inlet device for vapor deposition, which comprises a raw gas mixing cavity and two gas outlet passages, wherein the raw gas mixing cavity is provided with a gas inlet hole, the gas outlet passages are communicated with the mixing cavity and have the same gas outlet direction and different lengths, and the length proportion of the two gas outlet passages is 1:(0.3-0.6). The uniform gas flow gas inlet device has the advantages that reaction gas enters the mixing cavity through the gas inlet hole, gas is discharged to a mold in a deposition furnace through the two gas outlet passages, because the two gas outlet passages have different lengths, the longer gas outlet passage guides gas to flow to the middle of the mold, outlet gas can be uniformlydispersed and deposited onto all positions of the mold, the defect that the gas is gathered at the bottom of a crucible and is difficult to reach the upper part of the crucible to be deposited because the crucible is long is overcome, and the finished product rate of the produced crucible products is greatly improved.

Description

technical field [0001] The invention relates to a uniform airflow inlet device and a uniform airflow method for vapor deposition, and belongs to the technical field of producing pyrolysis boron nitride crucible products by vapor deposition. Background technique [0002] In recent years, due to its excellent properties such as high thermal conductivity, electrical insulation, and strong chemical inertness, pyrolytic boron nitride is very suitable for use as materials for crucibles, high-temperature fixtures, electronic component substrates, and dielectrics. Chemical vapor deposition (CVD) is the most commonly used method for producing pyrolytic boron nitride, and the pyrolytic boron nitride crucible products prepared by this method have good machinability and can well meet the application requirements. At present, a commonly used vapor deposition furnace includes a furnace body, a heating body, an air inlet, an air outlet, and a mould. , connected with an external motor to r...

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Problems solved by technology

At present, a commonly used vapor deposition furnace includes a furnace body, a heating body, an air inlet, an air outlet, and a mould. , connected with an external motor to rotate, the shape of the air outlet is generally bell-shaped, or a three-dimensional bell-shaped with two parallel planes, this type of air inlet is used for the production of plates or small-sized crucible products. The uniformity of the mold has little effect; but when producing pyrolytic boron nitride crucible products with a long length, the gas is easy to accumulate near the air inlet of the mold, resulting in uneven thickness of different parts of the crucible

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