A Translational Rotation Mechanism Based on Bidirectional or Multidirectional Electrostatic Actuators
An electrostatic drive, translation and rotation technology, applied in the direction of generators/motors, piezoelectric effect/electrostrictive or magnetostrictive motors, TV system components, etc., to achieve high precision, low energy consumption, and fast response Effect
Inactive Publication Date: 2015-09-09
贺思源 +1
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Problems solved by technology
However, it is still very challenging to realize large-travel translation and rotation motions with micro-electrostatic actuators.
Method used
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[0036] The best embodiment of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0037] like Figure 1-9As shown, the bidirectional or multi-directional electrostatic driver-based translation and rotation mechanism described in the embodiment of the present invention is composed of a transmission and conversion unit 2 and four electrostatic drivers 3, wherein the four electrostatic drivers 3 are used as rotary drive units, rotating The number of drive units depends on the designed actuator. For example, two electrostatic drivers 3 at an angle of 90° to each other produce the same effect as four electrostatic drivers 3 here, but are less flexible. The electrostatic driver 3 is composed of a static electrode 5 and a moving electrode 6 , and the transmission and conversion unit 2 is connected to the long static electrode 5 in the middle of each electrostatic driver 3 through a spring or a flexible device 4 . In this ...
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The invention discloses a translation rotating mechanism based on bidirectional or multidirectional electrostatic drivers, which comprises a standard base, a translation or rotating unit capable of transferring and converting an element, two or more electrostatic drivers, and one or more than one spring or flexible device, wherein each of the electrostatic drivers is composed of a fixed electrode and a moveable electrode; the fixed electrode is mounted on the standard base; and each spring or flexible device is used for connecting the fixed electrode to a transferred and converted element. As long as voltage is applied to the electrostatic drivers and voltage signals applied to the electrostatic drivers are respectively controlled, the electrostatic drivers can move relative to the standard base and the transferred and converted element can independently translate, independently rotate or simultaneously translate and rotate. Voltage signals are applied to the electrostatic drivers and the applied voltage signals are controlled so that the electrostatic drivers move relative to the standard base and the transferred and converted element can translate, rotate, or simultaneously translate and rotate.
Description
technical field [0001] The invention belongs to the field of micro translation and rotation mechanism and micro optoelectronic mechanical system, and in particular relates to a translation and rotation mechanism based on a bidirectional or multidirectional electrostatic driver. Background technique [0002] Micro-translation and rotation mechanism can be applied to wavefront correction of adaptive optics, spatial light modulation, confocal imaging of micro-endoscope, micro-movement of autofocus or auto-zoom lens, alignment of optical elements, micromanipulator and micro-displacement platform etc. Most of these application fields require plane translation or rotation, or both translation and rotation. For example, an adaptive optics module applied to a large ground telescope requires a movement of more than 10 μm, a wavefront correction of an adaptive optics module in the visual field requires a movement of more than 20 μm, and a small movement of an auto-focus or auto-zoom ...
Claims
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IPC IPC(8): B81B7/02B81C1/00
Inventor 贺思源奔瑞尔·瑞达
Owner 贺思源