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Planar transmission electron microscope (TEM) sample preparation method

A sample, plane technology, applied in the field of plane TEM sample preparation, can solve the problem of loss of acquisition process, and achieve the effect of improving the success rate, reducing the manufacturing cost and saving the manufacturing time

Inactive Publication Date: 2012-05-16
WUHAN XINXIN SEMICON MFG CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The object of the present invention is to provide a method for preparing a planar TEM sample, to solve the problem that the planar TEM sample obtained by the existing method for preparing a planar TEM sample is lost during the obtaining process

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  • Planar transmission electron microscope (TEM) sample preparation method
  • Planar transmission electron microscope (TEM) sample preparation method
  • Planar transmission electron microscope (TEM) sample preparation method

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Embodiment Construction

[0027] The planar TEM sample preparation method proposed by the present invention will be further described in detail below in conjunction with the accompanying drawings and specific examples. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

[0028] The core idea of ​​the present invention is to provide a method for preparing a plane TEM sample. By pasting a glass on the layer to be observed of the wafer section, after cutting the wafer section to obtain a plane TEM sample, the plane The TEM sample is surrounded on all sides. Thus, when the plane TEM sample is sucked by the suction needle, even if the plane TEM sample falls off from the wafer due to the suction needle, the plane TEM sample is not sucke...

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Abstract

The invention discloses a planar transmission electron microscope (TEM) sample preparation method. The planar TEM sample preparation method comprises the following steps of preparing a wafer cut block containing a layer needing to be observed, labeling the layer needing to be observed, pasting glass on the layer needing to be observed, simultaneously grinding the wafer cut block and the glass, and cutting the wafer cut block to obtain a planar TEM sample. The planar TEM sample obtained by the planar TEM sample preparation method has the advantage that when the planar TEM sample is sucked by a suction needle, even if the suction needle enables the planar TEM sample to fall off from wafer and cannot suck the planar TEM sample, the planar TEM sample falling off can be found soon without repreparation of a new planar TEM sample, and thus preparation time is saved and a preparation cost is reduced.

Description

technical field [0001] The invention relates to a method for manufacturing an integrated circuit observation sample, in particular to a method for preparing a plane TEM sample. Background technique [0002] With the development of semiconductor technology, the critical dimensions of semiconductor devices are continuously reduced. It is becoming more and more important to use high-resolution instruments to observe and analyze defects and specific micro-sizes, and then optimize the process. [0003] As an important tool of electron microscopy, transmission electron microscope (TEM) is usually used to observe the microstructure of materials, including crystal morphology, micropore size, multiphase crystallization and lattice defects, etc. up to 0.1nm. The working principle of the transmission electron microscope is as follows: put the transmission electron microscope sample (TEM sample) to be detected into the TEM observation room, irradiate the TEM sample with a high-voltage ...

Claims

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Application Information

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IPC IPC(8): G01N1/28
Inventor 陈卉谢火扬胡杰
Owner WUHAN XINXIN SEMICON MFG CO LTD
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