Angular speed sensor
An angular velocity sensor and angular velocity technology, applied to instruments, gyro effects for speed measurement, speed/acceleration/shock measurement, etc., can solve the problems of damaging the oscillator 101 and unable to remove useless signals, etc.
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Embodiment approach 1
[0041] figure 1 It is a circuit diagram of angular velocity sensor 1001 according to Embodiment 1 of the present invention.
[0042] The sensor element 30 is provided with: a vibrating body 31, a driving electrode 32 having a piezoelectric body for vibrating the vibrating body 31, a monitoring electrode 33 having a piezoelectric body that generates charges according to the vibration of the vibrating body 31, and a sensor element having a 30 Sensing electrodes 34, 35 of piezoelectric bodies that generate charges when angular velocity is applied. The sensing electrodes 34, 35 generate charges of opposite polarity. In the charge amplifier 36, the charge output from the monitor electrode 33 is amplified by a predetermined magnification and converted into a voltage. A band-pass filter (BPF) 37 outputs a monitor signal after removing noise components of the voltage output from the charge amplifier 36 . The automatic gain control (AGC) circuit 38 has a half-wave rectifying and sm...
Embodiment approach 2
[0067] Figure 4 It is a circuit diagram of angular velocity sensor 1002 according to Embodiment 2 of the present invention.
[0068] The sensor element 130 is provided with: a vibrating body 131, a driving electrode 132 having a piezoelectric body for vibrating the vibrating body 131, a monitoring electrode 133 having a piezoelectric body that generates charges according to the vibration state of the vibrating body 131, and a sensor The sensing electrodes 134, 135 of the piezoelectric body that generate electric charges when the element 130 is applied with angular velocity. The sensing electrodes 134, 135 generate charges of opposite polarity. The charge output from the monitor electrode 133 is amplified by a predetermined magnification in the charge amplifier 136 and converted into a voltage. A band-pass filter (BPF) 137 removes a noise component of the voltage output from the charge amplifier 136, and then outputs a monitor signal. An automatic gain control (AGC) circuit...
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