Array substrate, manufacturing method and detection method thereof and liquid crystal panel
A technology of an array substrate and a manufacturing method, which is applied in the field of liquid crystal display, and can solve problems such as the inability to check and obtain the electrical characteristics of TFT patterns in time
Inactive Publication Date: 2012-06-06
BOE TECH GRP CO LTD +1
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Problems solved by technology
[0005] The invention provides an array substrate, its manufacturing method and detection method, and a liquid crystal panel, so as to solve the problem that the electrical characteristics of the TFT pattern in the pixel area cannot be checked and known in time
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[0044] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0045] In the prior art, the process of manufacturing an array substrate with a bottom gate structure and detecting the electrical characteristics of TFT patterns is as follows: firstly, gate metal lines are formed on the substrate, and then silicon islands, source-drain metal lines, and TFTs are formed. channel, then form a passivation layer and pa...
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The invention discloses a manufacturing method and a detection method of an array substrate, and a liquid crystal panel. The manufacturing method of the array substrate provided by the invention at least comprises the following steps of: forming a TFT (Thin Film Transistor) pattern in a pixel area and forming a TFT test pattern in a test area correspondingly; and after the TFT channel in the pixel area is formed and before a passivating layer is formed, removing grid line leads in the test pattern or a grid insulated layer film above a source electrode and a drain electrode in the test pattern. The invention also discloses the detection method of the array substrate, which comprises the following steps of: after the TFT test channel is formed and the grid line leads in the test pattern or the grid insulated layer film above the source electrode and the drain electrode in the test pattern are removed, carrying out detection processing on electrical characteristics of the TFT test pattern. According to the invention, the electrical characteristics of the TFT test pattern in the pixel area can be checked and obtained in time, so that the adjustment on a process and equipment on the production line can be carried out in time.
Description
technical field [0001] The invention relates to liquid crystal display technology, in particular to an array substrate, a manufacturing method and a detection method thereof, and a liquid crystal panel. Background technique [0002] A liquid crystal display is a commonly used flat panel display at present, and a Thin Film Transistor Liquid Crystal Display (TFT-LCD for short) is a mainstream product in the liquid crystal display. [0003] In the production process of the TFT-LCD, it is an important step to check the electrical characteristics of the TFT pattern. In the prior art, a TFT test pattern dedicated for testing is usually formed in the edge area of the base substrate, ie, the test area, at the same time as the TFTs in the pixel area of the base substrate are formed. The pattern size, film layer structure and process flow of the TFT test pattern are completely consistent with those of the TFT in the pixel area. Therefore, by checking the TFT test pattern in the ...
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IPC IPC(8): H01L21/77H01L27/02H01L23/544G01R31/00G02F1/1362G02F1/13
CPCH01L22/34H01L22/20H01L27/1288G09G3/006G01R31/2884H01L27/124H01L22/14G02F2001/136254H01L2924/0002G02F1/136254H01L2924/00
Inventor 秦纬
Owner BOE TECH GRP CO LTD