Method for preparing carbon-doped titanium oxide thin film with photocatalytic activity

Abstract

The invention relates to a method for preparing a carbon-doped titanium oxide thin film with photocatalytic activity. The method is characterized by adopting CO2 as the carbon source and a high purity metallic titanium target as the sputtering target to prepare a carbon-doped titanium oxide thin film with photocatalytic activity on a stainless steel or glass substrate and specifically comprises the following steps: a. firstly implanting nitrogen ions to enhance the stainless steel substrate of a mirror surface to improve the strength of the surface of the stainless steel substrate; b. fixing the stainless steel or glass substrate enhanced by the nitrogen ions on a target table, vacuumizing the stainless steel or glass substrate to 10<-3>Pa, filling argon to clean the substrate for 5-15 minutes and then carrying out sputter cleaning on the target for 2-8 minutes; c. keeping the partial pressure of argon to be 0.3-0.7Pa, introducing CO2 to ensure the partial pressure in a vacuum chamber to reach 0.4-0.9Pa, keeping the target-substrate distance to be 50-100mm, starting a sputtering power supply, controlling the sputtering current to be 3A and substrate bias to be minus 150V and carrying out sputtering deposition for 10-120 minutes; and d. after the sputtering deposition process is completed, keeping vacuum cooling to the room temperature and then taking out the prepared sample. The method has the following beneficial effects: the carbon-containing composite target is unnecessary to be prepared; the process stabilization repeatability is good; the gas source is convenient; the method is simple; the coating cost is low; and the problem of photocatalyst immobilization can be solved.

Description

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AI Technical Summary

Benefits of technology

This new technique uses magnetically balanced plasma spray (MPS) instead of traditional ways for producing TiO2 coatings without any other materials like silicon or nitrogen. Gas sources used during this process have improved stability over time while reducing costs compared with current techniques such as chemical vapor deposition (CVD). Additionally, it allows for easy access by making use of an organosilane compound that has been modified into carboxylic acid groups, which helps fix photoactive catalysts onto these surfaces.

Problems solved by technology

Technologies related to improving the performance of titania based photovoltaics include reducing dark current absorption, controllably changing incident sunlight frequency, adjustable emission range, enhancing spectral sensitivity, creation of colored films that absorb specific colors, making them easier to produce, and utilizing various techniques such as laser irradiation and ionization/synthesis. These technical improvements help improve efficiency and effectiveness of photonuclear batteries.