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Graphite boat cooling and chip unloading trolley

A technology of graphite boats and sheet carts, which is applied in the direction of gaseous chemical plating, metal material coating technology, coating, etc., can solve the problems of space movement and time waste, and achieve the goals of reducing circulation time, convenient operation, and saving space Effect

Inactive Publication Date: 2012-07-04
XIAPU JIYANG NEW ENERGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to overcome the space action and time waste of the existing unloading table, the cart of the present invention provides a graphite boat cooling and unloading trolley, which can not only effectively complete the task of unloading , and can achieve the purpose of cooling at the same time

Method used

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  • Graphite boat cooling and chip unloading trolley
  • Graphite boat cooling and chip unloading trolley
  • Graphite boat cooling and chip unloading trolley

Examples

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Embodiment 1

[0014] Embodiment 1: as figure 1 , figure 2 , image 3 As shown, the unloading platform of the graphite boat cooling and unloading trolley has an overall steel bracket 5, and the graphite boat support plate 2 is connected as a whole through a fixed bracket 4, and four cooling plates are fixed under the graphite boat support plate. The device 3 is equipped with a flower basket support 1 on the top of the trolley for placing the unloading flower basket, and can move left and right to ensure the convenience of inserting work.

[0015] A cooling and unloading trolley, which is composed of an overall support bracket, a graphite boat support plate, a flower basket bracket, a cooling device and a fixed support. The cooling device is installed. After the high-temperature graphite boat is taken out of the furnace tube, it is placed on the unloading table , can meet the purpose of cooling graphite boat and silicon wafer, and can also play multiple functions of transfer car and unload...

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Abstract

The invention discloses a graphite boat cooling and chip unloading trolley and relates to the unloading of a silicon chip for a solar cell plasma enhanced vapor chemical deposition (PEVCD) procedure, in particular to a chip unloading trolley with a silicon chip cooling function. The chip unloading trolley mainly comprises a general steel bracket 5 which is connected with a graphite boat support plate 2 through a fixed bracket 4 to form a whole. Four cooling devices 3 are fixed below the graphite boat support plate. A flower basket bracket 1 is arranged at the topmost end of a chip unloading table and is used for unloading the chip. The graphite boat cooling and chip unloading trolley is simple in structure and is convenient to operate; and the silicon chip can be unloaded and cooled at the same time, so that transfer time is saved, and the space can be effectively reduced.

Description

technical field [0001] The invention relates to a graphite boat cooling and unloading trolley capable of effectively saving workshop space, in particular capable of completing cooling and unloading at the same time. Background technique [0002] At present, the known PE unloading trolley only plays the role of a simple transport and transfer vehicle. Its function is to put the coated silicon wafers from the PECVD furnace tube on the unloading table and push them to the independent cooling system for cooling. . After cooling, the trolley is sent to the unloading table for unloading work. From cooling to unloading, two devices are required, namely the silicon wafer cooling system and the unloading table. These two devices take up a lot of space in the workshop , and from the unloading table to the cooling device involves the actions of handling and circulation and waste of time. Contents of the invention [0003] In order to overcome the space action and time waste of the ...

Claims

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Application Information

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IPC IPC(8): C23C16/44
Inventor 孙良欣胡盛华李卫平
Owner XIAPU JIYANG NEW ENERGY
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