Unlock instant, AI-driven research and patent intelligence for your innovation.

Method for depositing compact barium strontium titanate film on glass substrate

A technology of barium strontium titanate thin film and glass substrate, applied in metal material coating process, coating and other directions, can solve the problems of untestable dielectric properties and ferroelectric properties of thin films, small acting force, low thin film compactness, etc. To achieve the effect of uniform functionalization, convenient operation and high surface density

Inactive Publication Date: 2012-07-04
SHAANXI UNIV OF SCI & TECH
View PDF2 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the preparation of functional ceramic films by liquid phase self-assembly technology, the film is prepared by electrostatic adsorption and chemical bonding, the force is small, and there is a defect that the prepared film is low in density, which leads to the dielectric properties and ferroelectric properties of the film prepared by this method. Performance cannot be tested

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for depositing compact barium strontium titanate film on glass substrate
  • Method for depositing compact barium strontium titanate film on glass substrate
  • Method for depositing compact barium strontium titanate film on glass substrate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Step 1: Configure the precursor solution: mix 0.0002mol Ba(NO 3 ) 2 , 0.0008mol Sr(NO 3 ) 2 , 0.001mol (NH 4 ) 2 TiF 6 , 0.003mol H 3 BO 3 Put them into 4 beakers respectively; then add deionized water to the 4 beakers respectively, and ultrasonically oscillate for 10 minutes. After oscillating, pour the four solutions into a beaker and set the volume to 100mL; finally place it on a magnetic stirrer and stir for 10 minutes , remove after shaking. Add dilute nitric acid dropwise to adjust the pH value to 3.1 to make the solution clear and transparent to obtain the precursor solution.

[0027] Step 2: Put the configured precursor solution together with the beaker into the vacuum box, turn on the vacuum pump, and adjust the vacuum pressure to -0.2Kg / cm 2 , the vacuum time is 45mins, until the solution has no bubbles to discharge;

[0028] Step 3: Put the hydrophilic glass substrate with OTS (octadecyl-trichloro-silane, octadecyl trichlorosilane) monomolecular fil...

Embodiment 2

[0032] Step 1: Configure the precursor solution: mix 0.0002mol Ba(NO 3 )2 , 0.0008mol Sr(NO 3 ) 2 , 0.001mol (NH 4 ) 2 TiF 6 , 0.003mol H 3 BO 3 Put them into 4 beakers respectively; then add deionized water to the 4 beakers respectively, and ultrasonically oscillate for 10 minutes. After oscillating, pour the four solutions into a beaker and set the volume to 100mL; finally place it on a magnetic stirrer and stir for 10 minutes , remove after shaking. Add dilute nitric acid dropwise to adjust the pH value to 2.0 to make the solution clear and transparent to obtain the precursor solution.

[0033] Step 2: Put the configured precursor solution together with the beaker into the vacuum box, turn on the vacuum pump, and adjust the vacuum pressure to -0.2Kg / cm 2 , the vacuum time is 60mins, until the solution has no bubbles to discharge;

[0034] Step 3: Put the hydrophilic glass substrate with OTS (octadecyl-trichloro-silane, octadecyl trichlorosilane) monomolecular film ...

Embodiment 3

[0038] Step 1: Configure the precursor solution: mix 0.0002mol Ba(NO 3 ) 2 , 0.0008mol Sr(NO 3 ) 2 , 0.001mol (NH 4 ) 2 TiF 6 , 0.003mol H 3 BO 3 Put them into 4 beakers respectively; then add deionized water to the 4 beakers respectively, and ultrasonically oscillate for 10 minutes. After oscillating, pour the four solutions into a beaker and set the volume to 100mL; finally place it on a magnetic stirrer and stir for 10 minutes , remove after shaking. Add dilute nitric acid dropwise to adjust the pH value to 2.5 to make the solution clear and transparent to obtain the precursor solution.

[0039] Step 2: Put the configured precursor solution together with the beaker into the vacuum box, turn on the vacuum pump, and adjust the vacuum pressure to -0.2Kg / cm 2 , the vacuuming time is 30mins, until the solution has no bubbles to discharge;

[0040] Step 3: Put the hydrophilic glass substrate with OTS (octadecyl-trichloro-silane, octadecyl trichlorosilane) monomolecular ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a method for depositing a compact barium strontium titanate film on a glass substrate, which comprises the following steps: 1. preparing a precursor solution; 2. putting the prepared precursor solution together with a beaker into a vacuum chamber to carry out vacuum treatment until no bubble is discharged from the precursor solution; 3. putting a hydrophilic glass substrate with an OTS monomolecular film into the precursor solution subjected to vacuum treatment to carry out selfassembly growth of the film; and 4. annealing the deposited film at 600 DEG C for 2 hours to finally obtain the compact barium strontium titanate film. The precursor solution vacuum treatment technology and frequent induction adsorption liquid-phase selfassembly method are utilized to prepare the compact barium strontium titanate film on the glass substrate; and thus, the compact barium strontium titanate film has high surface density and functional uniformity, and the treatment process is simple and convenient to operate.

Description

【Technical field】 [0001] The invention belongs to the field of functional materials and relates to a method for preparing a densified thin film by a wet chemical liquid phase method. 【Background technique】 [0002] Barium strontium titanate (Ba x Sr 1-x TiO 3 ) ferroelectric thin film has the characteristics of small leakage current, not easy to fatigue, adjustable Curie temperature, high pyroelectric coefficient, strong nonlinearity, etc., and can be widely used in dynamic random access memory (DRAM), pyroelectric infrared detector, medium phase shifter, H 2 In devices such as detectors, it is one of the most promising ferroelectric thin film materials. Ba has been prepared by pulsed laser deposition (PLD), magnetron sputtering, sol-gel (sol-gel), metal-organic chemical vapor deposition (MOCVD) and other methods. x Sr 1-x TiO 3 film. The uniformity of the film in the pulsed laser deposition method is poor, it is difficult to produce a high-quality large-area film, a...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): C23C26/00
Inventor 谈国强韩伟光程蕾
Owner SHAANXI UNIV OF SCI & TECH