Active vibration damping system as well as vibration damping unit and absolute displacement measuring device thereof

Abstract

The invention provides an active vibration damping system based on absolute displacement feedback and used for realizing active vibration damping on a load. The active vibration damping system comprises at least three vibration damping units used for realizing six degree-of-freedom active vibration damping on the load, wherein each vibration damping unit is provided with an absolute displacement measuring device, and the absolute displacement measuring device is used for detecting the absolute displacement of the load in real time; and a vibration damping control unit is respectively connected with the at least three vibration damping units, and the vibration damping control unit realizes active feedback control according to the absolute displacement. The vibration damping system based on the absolute displacement feedback has the following advantages: an air spring and a linear actuator work together to carry out active vibration damping, and the absolute displacement feedback technique is adopted to effectively improve the vibration damping performance of the vibration damping system, effectively increase position loop bandwidth of the vibration damping system and enhance the positional stability of the vibration damping system; and the active vibration damping system is convenient to use, small in size and lower in cost.

Description

technical field [0001] The invention relates to an integrated circuit manufacturing process equipment, in particular to an active damping system, a damping unit and an absolute displacement measuring device thereof. Background technique [0002] The ultra-precise active damping system is the basis of many high-tech technologies and product development, so it has been highly valued by various countries. With the improvement of users' requirements for precision equipment, many precision equipment (such as photolithography machines, precision measuring instruments, etc.) have increasingly stringent vibration requirements. Common active shock absorbers generally use air springs connected in parallel with active actuators. In order to effectively improve the damping effect of the damping system, the common practice is to use various technical means to reduce the stiffness of the damping system, thereby reducing the natural frequency of the damping system. [0003] Patent EP 174...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide an absolute displacement measuring device, through which the absolute displacement of the load can be obtained, and the absolute displacement can be used to realize a six-degree-of-freedom active vibration reduction system, so as to solve the problem that the existing active vibration reduction system is susceptible to external interference , complex structure, bulky, and high cost technical problems

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