Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian'

Abstract

The invention discloses a biaxially resonant silicon-micromachined accelerometer in the shape of a Chinese character 'tian' and aims at designing and manufacturing a high-sensitivity and high-resolution biaxially-resonant silicon-micromachined accelerometer. The structure is characterized in that (1) because a mass block structure in the shape of a Chinese character 'tian' is adopted, the volume of a mass block is maximized, and the acceleration can be converted into an inertial force more effectively; and the whole structure is symmetrically distributed, which is favorable for resisting noises and inhibiting temperature drift; (2) a support beam (in the shape of a Chinese character 'ji') arranged at the periphery of the structure facilitates the release of the residual stress and temperature stress of the structure, thereby reducing the support stiffness of the structure in a sensitive direction; (3) due to the application of a spring-like beam (in the shape of a Chinese character 'kou') at one end of a resonator, the influence of external shocks on the beam is reduced, and the spring-like beam plays a role in releasing the residual stress of the structure; and (4) an arc structure at the root part of a tuning fork in the resonator can be used for effectively reducing the energy coupling and improving the mechanical quality factor of the resonator, and is easy for realizationof closed-loop control.

Description

technical field [0001] The invention relates to a resonant accelerometer structure, in particular to a "Tian"-shaped biaxial resonant silicon micromachined accelerometer structure, which belongs to the design direction of MEMS (Micro-electromechanical Systems) sensors in the field of inertial navigation design. Background technique [0002] Accelerometers have been regarded as one of the most important inertial instruments since their appearance. They are used in inertial navigation and inertial guidance systems, and are attached to the automatic driving of sea, land, air and space vehicles and the high-precision guidance of high-tech weapons. In the early 1940s, the Germans developed the world's first pendulum gyro accelerometer. For more than half a century since then, due to the requirements of inertial measurement components in aviation, navigation and aerospace fields, various new accelerometers have emerged, and their performance and accuracy have been greatly improved...

AI Technical Summary

Problems solved by technology

[0004] However, due to technical limitations, the sensitivity and resolution of resonant silicon micromachined accelerometers developed in China cannot meet the requirements of high-precision applications, and most studies are limited to single-axis accelerometers. There are relatively few studies

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