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Liquid floating rotor type microgyroscope based on nano super-oleophobic effect

A super-oleophobic and rotor technology, which is applied in the direction of rotating gyroscopes, can solve the problems of no obvious improvement in the accuracy of rotating micro-gyroscopes, small rotor volume, rotor speed and stability limitations, etc., to achieve reduced resistance, high precision, The effect of fast movement

Inactive Publication Date: 2012-07-11
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, because the traditional suspended rotor gyroscope uses electromagnetic force or electrostatic force to levitate the rotor, the volume of the rotor is very small, the speed and stability of the rotor are limited, and the accuracy of the rotary micro-gyroscope has not been significantly improved.

Method used

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  • Liquid floating rotor type microgyroscope based on nano super-oleophobic effect
  • Liquid floating rotor type microgyroscope based on nano super-oleophobic effect
  • Liquid floating rotor type microgyroscope based on nano super-oleophobic effect

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] A liquid-floating rotor-type micro-gyroscope based on the nano-superoleophobic effect, comprising an upper cover (5-1), a lower cover (5-2), and a sealed cavity (2) whose inner wall is made of a superoleophilic material, capable of firm The oil (3) with a vaporization temperature above 120°C adsorbed on the inner wall of the sealed cavity (2), the rotor (4) made of permanent magnetic material and treated with nano-superoleophobic surface, and 4 wound with Electromagnetic drive stator (1) for drive coil, the number of turns of drive coil wound on the four stators is exactly the same, the rotor (4) is located inside the sealed cavity (2), and the space between the cavity (2) and the rotor (4) is filled with oil (3), the surface of the rotor is adsorbed with a gas film due to the nano-super-oleophobic effect, which is beneficial to reduce the resistance when the rotor rotates. The rotor is a hollow cylindrical structure, and the rotor is suspended in liquid oil. The electro...

Embodiment 2

[0024] The fabrication process of a liquid-floating rotor-type micro-gyroscope based on the nano-superoleophobic effect is as follows: figure 1 , 2 shown. The cavity is processed by mechanical stamping, the rotor, and the four stators (1) are processed by molds; the processed cavity and abrasive tools are planed by a grinder, and the oil with a high vaporization temperature used in the micro-gyroscope cavity (3) Carry out density measurement, design the micro-gyro rotor (4) of hollow structure, make the equivalent density of rotor (4) and the density of liquid (3) be equal, adopt the method for mechanical processing to complete the rotor (4) of hollow structure manufacture , measure the equivalent density of the rotor (4) after processing, and use a precision grinder to correct the rotor surface, so that the equivalent density of the rotor is the same as that of the liquid, and the center of gravity, center, and buoyancy center of the rotor overlap. The magnetizer is magneti...

Embodiment 3

[0026] Apply 4 driving signals with a phase difference of 90° to the 4 coils of the stator, such as image 3 As shown, the driving waveforms of the four poles a, b, c, and d are phase-shifted by 90° in turn. When the a-pole current is in the positive direction, the magnetic field force generated by the a-phase excitation magnetic field causes the rotor to rotate to the position where the rotor pole axis coincides with the stator pole axis (at this time, the reluctance is the smallest), thereby generating an electromagnetic torque with a reluctance property. If the a-b-c-d phase windings are energized in sequence, the rotor will rotate counterclockwise continuously; when there is no external angular velocity input, the rotor will rotate smoothly without deflection. Therefore, the equivalent detection capacitance value will not change, and the differential detection output is zero, indicating that there is no external angular velocity input. When there is an external angular ve...

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Abstract

The invention discloses a liquid floating rotor type microgyroscope based on a nano super-oleophobic effect. The liquid floating rotor type microgyroscope comprises an upper cover sheet, a lower cover sheet, a sealing cavity, of which the inner wall is made of a super-oleophilic material, oil which can be firmly adsorbed on the inner wall of the sealing cavity and has evaporation temperature of higher than 120 DEG C, a rotor which is made of a permanent magnet material and of which the surface is subjected to nano super-oleophobic treatment and four electromagnetic driving stators wound with driving coils, wherein the numbers of turns of the driving coils wound on the four stators are totally the same; the rotor is positioned inside the sealing cavity; the oil is filled between the cavity and the rotor; a gas thin film is adsorbed on the surface of the rotor because of a nano super-oleophobic effect; the rotor has a hollow cylindrical structure, and is suspended in the liquid oil; the electromagnetic driving stators are clamped on the outer side of the sealing cavity by silicon steel sheets; the sealing cavity is made of a non-magnetic material; and the upper cover sheet and the lower cover sheet are sealed with the cavity in a bonding or adhesion manner. The liquid floating rotor type microgyroscope has the advantages that: the preparation process is simple; the running speed of the rotor is high; the stability is high; and the liquid floating rotor type microgyroscope has relatively higher precision than that of a vibration type gyroscope.

Description

technical field [0001] The invention relates to a structure of a micro-gyroscope, in particular to a liquid-floating-rotor micro-gyroscope based on the nanometer super-oleophobic effect. Background technique [0002] A gyroscope is a sensing device that measures the angle or velocity of an object relative to inertial space. MEMS micro gyro is the product of the combination of MEMS technology and inertial technology, and it is one of the main development directions of gyro technology in the future. MEMS micro gyro has the advantages of small size, light weight, low power consumption, impact resistance, and can be applied to relatively harsh environmental conditions. Core device. [0003] At present, the micro-gyroscope mainly adopts the vibrating structure, and the vibrating gyroscope is usually driven by electrostatic or electromagnetic force, so that the closed-loop resonance of the active mass block is at the resonant frequency of the mechanically sensitive structure, so...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/02G01C19/14
Inventor 张海峰刘晓为赵振刚董长春汪东博
Owner HARBIN INST OF TECH