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Multimode interference biological chemical sensor based on silicon slot waveguides

A multi-mode interference and sensor technology, applied in the field of accurate detection of biological/chemical substances and integrated optical sensing, can solve the problems of large volume, low efficiency and high cost, and achieve easy integration, low economic cost, and manufacturing tolerance. Good results

Inactive Publication Date: 2013-11-06
SOUTHEAST UNIV
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  • Claims
  • Application Information

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Problems solved by technology

Among them, the sensors based on the first two have the disadvantages of large size, high cost, and low efficiency, while the multimode interference structure naturally has the advantages of compactness, robustness, easy fabrication, and good tolerance. The proposal of the mode interference structure is an innovative contribution in the field of optical sensing

Method used

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  • Multimode interference biological chemical sensor based on silicon slot waveguides
  • Multimode interference biological chemical sensor based on silicon slot waveguides
  • Multimode interference biological chemical sensor based on silicon slot waveguides

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Embodiment Construction

[0023] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.

[0024] see figure 1 -6. The present invention discloses a multi-mode interference biochemical sensor based on a silicon-based grooved waveguide. The sensor includes an input waveguide 1 for inputting optical signals, two output waveguides, that is, a first output waveguide 3, and a second output waveguide. Two output waveguides 4, a multimode interference waveguide 5, the input waveguide 1, the first output waveguide 3, and the second output waveguide 4 are connected through the multimode interference waveguide 5.

[0025] The multimode interference waveguide 5 is tapered.

[0026] A single-wavelength optical signal is input from the input waveguide 1, and multi-mode interference occurs in the area of ​​the multi-...

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Abstract

The invention discloses a multimode interference biological chemical sensor based on silicon slot waveguides, which is characterized by comprising an input waveguide (1), two output waveguides, namely, a first output waveguide (3) and a second output waveguide (4), and a multimode interference waveguide (5), wherein the input waveguide (1) is used for inputting optical signals, the input waveguide (1) is connected with the first output waveguide (3) and the second waveguide (4) through the multimode interference waveguide (5), the multimode interference waveguide (5) is tapered, single wavelength optical signals are input through the input waveguide (1) and subjected to multimode interference in an area of the multimode interference waveguide (5), input lights are subjected to self-imaging length regeneration on the basis of the self-imaging effect of multimode interference, and the self-imaging length is selected as the length of the sensor. The multimode interference biological chemical sensor based on silicon slot waveguides has the advantages of compact structure, insensitive polarization, high bandwidth, good fabrication tolerance and large working range.

Description

technical field [0001] The invention relates to the field of precise detection and integrated optical sensing of biological / chemical substances, in particular to the structure of a novel multi-mode interference biological / chemical sensor based on a silicon-based grooved waveguide. Background technique [0002] Biochemical sensors are sensors that can directly provide information about the types and concentrations of biological and chemical substances around them, and have gained momentum from the development of electronic computers, new materials and microelectronic processing technologies. Diagnostics, drug screening, food safety, environmental and safety monitoring, and other areas play a very important role. [0003] Optical bio / chemical sensors are divided into two categories: labeled and unlabeled sensors. Among them, label detection has the disadvantages of high cost, time-consuming, and easy interference; while label-free sensors have the characteristics of high sens...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/41
Inventor 肖金标
Owner SOUTHEAST UNIV
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