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Terahertz detector comprising a capacitively coupled antenna

A capacitive coupling and detector technology, applied in the direction of electrical radiation detectors, antennas, and mid-position feeds between antenna endpoints

Inactive Publication Date: 2012-07-11
IBM CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, passive THz imaging requires three orders of magnitude higher sensitivity than passive infrared (IR) imaging, a challenging gap

Method used

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  • Terahertz detector comprising a capacitively coupled antenna
  • Terahertz detector comprising a capacitively coupled antenna
  • Terahertz detector comprising a capacitively coupled antenna

Examples

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Embodiment Construction

[0024] exist figure 1 A diagram illustrating one exemplary embodiment of a passive THz radiation detector is shown in . This THz radiation detector embodiment, generally designated 10 , includes antenna strip 12 , capacitive coupling gap 18 , suspended platform 16 , resistor 22 , thermal sensing element 24 , support arm 14 and substrate 28 . The etched area indicated by 29 provides isolation from the surrounding other detectors.

[0025] The THz detector 10 utilizes electromagnetic coupling techniques whereby optical energy (i.e., THz energy) is first absorbed by an antenna 12 (comprising a crossed-dipole bow-tie type antenna in this particular example), which is used to convert the optical energy into electrical energy, The electrical energy is then capacitively coupled to a thermally isolated, released thermal sensor element (eg, diode, transistor, etc.). Capacitively coupling the antenna to the thermal sensor element provides thermal isolation of the sensor from the anten...

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Abstract

A THz radiation detector (10) comprises a plurality of antenna arms (12) separated from a suspended platform (16) by an isolating thermal air gap (18). The detector functions to concentrate THz radiation energy into the smaller suspended MEMS platform (e.g., membrane) upon which a thermal sensor element (24) is located. The THz photon energy is converted into electrical energy by means of a pixilated antenna using capacitive coupling in order to couple this focused energy across the thermally isolated air gap and onto the suspended membrane on which the thermal sensor is located.

Description

technical field [0001] The invention relates to the field of semiconductor imaging devices, in particular to a monolithic passive THz (terahertz) detector. Background technique [0002] THz radiation imaging is a research field that is currently developing at an exponential rate and has inherent applications like THz security imaging or medical THz imaging, which can reveal weapons hidden under clothing from a distance of ten meters away, and medical THz imaging Imaging can reveal, for example, skin cancer tumors hiding beneath the skin as well as allow for completely safe dental imaging. Constructing state-of-the-art THz detectors is often a challenging task because both the radiation source and the radiation detector are complex, difficult and expensive to manufacture. [0003] THz radiation is non-ionizing and therefore, unlike X-ray radiation, it is completely safe for humans. THz imaging for security applications uses e.g. passive imaging techniques, i.e. without usin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J5/20G01J5/02G01J5/08H01Q15/00
CPCG01J5/022H01Q9/28G01J5/0837G01J5/08G01J2005/0077H01Q19/108H01Q15/0006G01J5/02G01J5/20H01Q15/0013H01Q15/004
Inventor D·高恩T·莫尔弗I·博格D·伊拉德
Owner IBM CORP