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Boron-doped glass carbon material and preparation method thereof

A technology of glassy carbon and boron doping, applied in metal material coating process, gaseous chemical plating, coating, etc., can solve the problems of long production cycle, complex production process, single specification, etc., and achieve excellent oxidation resistance, The structure is dense and uniform, and the effect of high production efficiency

Active Publication Date: 2014-07-30
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In order to meet the needs of glassy carbon as a high-temperature corrosion-resistant and high-temperature-oxidation-resistant mechanical sealing material or coating material, the purpose of the present invention is to provide a boron-doped glassy carbon material and its preparation method to solve the problem of the existing glassy carbon material preparation. There are problems such as complex production process, long production cycle, low efficiency and single specification in the technology

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  • Boron-doped glass carbon material and preparation method thereof
  • Boron-doped glass carbon material and preparation method thereof
  • Boron-doped glass carbon material and preparation method thereof

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Embodiment 1

[0029] The deposition temperature is 1200° C., the flow rate of propane gas is 100 mL / min, the flow rate of boron trichloride gas is 150 mL / min, and the flow rate of hydrogen gas is 500 mL / min. The deposition substrate is a graphite tube with an inner diameter of 30 mm and a polished inner surface. In this embodiment, the reaction time is 1 hour, and a boron-doped glassy carbon inner coating material is obtained, the coating thickness is about 1 mm, and the boron doping amount is 5.1 at.%.

[0030] Such as figure 2 As shown, observed under a metallographic microscope, the prepared glassy carbon has a dense structure, very few pores, no growth characteristics, non-optical activity, and is an isotropic material.

[0031] Such as image 3 As shown, the X-ray diffraction spectrum of the material indicates that the material is a two-phase mixture of carbon and boron carbide. Among them, glassy carbon has the characteristics of amorphous or turbostratic carbon, while the diffrac...

Embodiment 2

[0035] The deposition temperature is 1150° C., the flow rate of propane gas is 100 mL / min, the flow rate of boron trichloride gas is 100 mL / min, and the flow rate of hydrogen gas is 500 mL / min. The deposition substrate is a graphite cylinder with a diameter of 15 mm and a length of 40 mm, with a polished surface. In this embodiment, the reaction time is 1 hour, and the inner and outer coating materials of circular boron-doped glassy carbon are obtained, the coating thickness is about 0.5 mm, the boron doping amount is 2.8 at.%, and the boron element is mainly in the form of boron carbide , uniformly distributed in the glassy carbon matrix.

Embodiment 3

[0037]The deposition temperature is 1250° C., the flow rate of propane gas is 100 mL / min, the flow rate of boron trichloride gas is 80 mL / min, and the flow rate of hydrogen gas is 700 mL / min. The deposition substrate is a graphite plate with a length of 60 mm, a width of 30 mm, and a thickness of 4 mm, and the surface is polished. In this embodiment, the reaction time is 2 hours, and a boron-doped flat glassy carbon coating material is obtained. The coating thickness is about 1.5 mm, and the boron doping amount is 3.1 at.%, and the boron element is mainly in the form of boron carbide. uniformly distributed in the glassy carbon matrix.

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Abstract

The invention, relating to the field of glass carbon material, particularly discloses a boron-doped glass carbon material and a method for preparing the material by chemical vapor deposition. The method is characterized by using chemical vapor codeposition process, using graphite as a deposition substrate, letting the deposition pressure be a normal pressure or a little more than 1 atm and the deposition temperature be 1100-1400 DEG C, after reaching the set deposition temperature, simultaneously letting in carbon source and boron source gases to realize boron-carbon codeposition in a high temperature chemical vapor furnace, wherein the content of the doped boron in the prepared boron-doped glass carbon material is 2-15 at.%. The method can prepare the boron-doped glass carbon material with uniform and compact structure, good oxidation resistance, smooth surface with vitreous luster, small porosity, special glassy fracture, and no growth characteristics, and the prepared material is an isotropic material. Because the method utilizes the conventional chemical vapor deposition device to prepare, the steps of forming, solidifying, carbonizing, graphitizing and other complicated steps of traditional glass carbon are omitted, thus the production cycle of glass carbon is greatly shortened, and the production cost is reduced.

Description

technical field [0001] The invention relates to the field of glassy carbon materials, in particular to a boron-doped glassy carbon material and a chemical vapor deposition preparation method thereof. Background technique [0002] Glassy carbon (Glassy carbon) material is a new type of special carbonaceous material, which has the characteristics of both carbon materials and glass, such as low density, high strength, high hardness, high electrical conductivity and high thermal conductivity, good biocompatibility, high temperature resistance, Corrosion-resistant, wear-resistant, almost airtight and isotropic, etc., are widely used in the fields of electronics industry, semiconductor industry, metallurgical industry, chemical industry, machinery industry, nuclear industry, aerospace and medical research. At present, the basic process of preparing glassy carbon materials is to solidify the specially treated polymer prepolymer precursor at low temperature to form a green body, and...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/26
Inventor 吴峻峰白朔许力成会明徐红军周序科罗川周金玉
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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