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Method and device for measuring pixel pitches of image sensor by utilizing line light source

An image sensor and pixel pitch technology, applied in measurement devices, optical devices, instruments, etc., can solve problems such as defocusing, and achieve the effects of improving repeatability, reducing errors, and accurate cut-off frequency positions.

Active Publication Date: 2012-08-01
HARBIN INST OF TECH
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Problems solved by technology

[0041] The present invention aims at the problem that the above-mentioned existing measurement method is not suitable for measurement in a small field of view, and the problem that the existing measurement device has defocus, and proposes a method and device for measuring the pixel pitch of an image sensor in the frequency domain. Improves the repeatability of measurement results within the field; the device can eliminate the influence of defocus on measurement results

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  • Method and device for measuring pixel pitches of image sensor by utilizing line light source
  • Method and device for measuring pixel pitches of image sensor by utilizing line light source
  • Method and device for measuring pixel pitches of image sensor by utilizing line light source

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Embodiment Construction

[0065] The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0066] figure 1 It is a schematic structural diagram of an image sensor pixel pitch measurement device using a line light source, and its planar light path diagram is as follows figure 2 As shown; the device includes a line light source 1, an optical system 2, and an image sensor 3, and the line light source 1 is imaged to the surface of the image sensor 3 through the optical system 2, and, in the direction of the optical axis of the device and the row direction of the image sensor 3 In a determined plane, the line light source 1 is curved, and any position on the line light source 1 is quasi-focused and imaged on the surface of the image sensor 3; wherein, the lateral length of the line light source 1 is 1.526mm, and the lateral enlargement of the optical system 2 The rate is 0.0557.

[0067]A method for measuring the pixel pit...

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Abstract

A method and a device for measuring pixel pitch of an image sensor by utilizing a line light source belong to a field of calculating a length, a width or a thickness in a measuring equipment field which is characterized by applying optical method. The method for measuring the pixel pitch of the image sensor by utilizing line light source is characterized in that a linear image is acquired by targeting the line light source, a value range of the pixel pitch is searched in a frequency domain, the pixel pitch of the image sensor is acquired by calculating on the basis of utilizing a search algorithm in case that the contact ratio between a practical modulation transfer function curve which is related to the pixel pitch and a theoretical modulation transfer function curve is the best under least squares conditions. The device for measuring the pixel pitch of the image sensor by utilizing line light source is located in the plane determined by an optical axis direction and a row direction or a column direction of the image sensor, the line light source is of forniciform, any part of the line light source can be subjected to quasi focal imaging to the surface of the image sensor. By adopting the method for measuring the pixel pitch of the image sensor by utilizing line light source, error between single measurement results can be reduced to improve repeatability of the measurement results.

Description

technical field [0001] The method and device for measuring the pixel pitch of an image sensor using a line light source belong to the field of measuring length, width or thickness in the field of measuring equipment characterized by the use of optical methods, and in particular relate to a line light source as the target, using line in the frequency domain A measurement method and device for measuring the pixel pitch of an image sensor by using a light source image. Background technique [0002] Image sensor pixel pitch is a very important technical indicator in the field of precision measurement. For example, if a target with a known size is imaged through an optical system, the size of the target image can be known according to the number of pixels of the image sensor occupied by the target image and the pixel pitch, and finally the size of the target image can be compared with the target size to obtain The lateral magnification of the optical system can be calibrated; in...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/14
Inventor 谭久彬赵烟桥刘俭
Owner HARBIN INST OF TECH
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