Orange-peel encapsulating structure for bionic vector hydrophone of micro-electro-mechanical system

Abstract

The invention relates to an orange-peel encapsulating structure for a bionic vector hydrophone of a micro-electro-mechanical system. Different performance indexes of the hydrophone can be further improved through the orange-peel encapsulating structure. The orange-peel encapsulating structure comprises a support pipe, wherein the top part of the support pipe is provided with a necked-in tubule, the top part of the necked-in tubule is provided with a support disc, the edge of the support disc is provided with a ring-shaped clamping groove, the inside of the ring-shaped clamping groove is fixedly connected with a sound transmission cap, a bottom orifice of the support pipe is provided with a choke plug and a locking nut, a support platform which is fixedly arranged on the support disc, and an orange-peel metal bracket which is threadedly connected onto the support platform are also arranged inside the sound transmission cap, a flexible bracket for holding a four-beam-ciliary-type sensitive body is clamped between the support platform and the orange-peel metal bracket, and the sound transmission cap, the orange-peel metal bracket, the four-beam-ciliary-type sensitive body, the flexible bracket and the support platform are closely and seamlessly combined with one another. Compared with the hydrophone adopting the existing encapsulating structure, the resonance frequency of the hydrophone adopting the orange-peel encapsulating structure can be improved by about three times, the sensitivity can be improved by 20dB, and the reliability and the shock resistance of the hydrophone can also be obviously improved.

Description

technical field [0001] The invention relates to a MEMS bionic vector hydrophone, in particular to a segmented orange package structure of the MEMS bionic vector hydrophone. Background technique [0002] MEMS vector hydrophone is one of the research hotspots in the field of acoustic transducers at home and abroad. The Chinese invention patent application with the patent application number 200610012991.0 discloses a "resonant tunneling bionic vector underwater acoustic sensor", which has been recognized at home and abroad because of its advantages of small size, vector and rigid installation, but will To realize its engineering application, the performance and reliability of its packaging structure must be further improved. At present, although there are many types of packaging structures used for MEMS vector hydrophones, these packaging structures still have a certain room for improvement. The improved packaging structure is still very helpful for improving the various perfo...

AI Technical Summary

Problems solved by technology

The Chinese invention patent application with the patent application number 200610012991.0 discloses a "resonance tunneling bionic vector underwater acoustic sensor", which has been recognized at home and abroad because of its advantages of small size, vector and rigid installation, but will To achieve engineering applications, the performance and reliability of its packaging structure must be further improved

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