Gasoline sensor and manufacturing method thereof
A manufacturing method and sensor technology, applied in the sensor field, can solve the problems of weak gas selectivity, high sensor sensitivity, strong selectivity, and rapid response that cannot be satisfied at the same time, and achieve fast response time, low production cost, and strong selectivity. Effect
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Embodiment 1
[0034] Take 70g of WO 3 , 5g of La 2 o 3 , 8g SiO 2 , 3g TiO 2 , 6g of SnO 2 , 3g of Gd 2 o 3 , 2 g MoO 3 , 2g of Nd 2 o 3 , 1g of Pt, add deionized water and grind to make a slurry. Among them: WO 3 Powder material with a particle size of 5-50nm, La 2 o 3 Powder material with a particle size of 5-60nm, SiO 2 Powder material with a particle size of 10-70nm, TiO 2 Powder material with a particle size of 5-60nm, SnO 2 Powder material with a particle size of 5-60nm, Gd 2 o 3 Powder materials with a particle size of 10-70nm, Pt powder materials with a particle size of 10-50nm, MoO 3 Powder material with a particle size of 10-70nm, Nd 2 o 3 Powder materials with a particle size of 10-70nm, and the ash content of sensitive materials is not higher than 0.3%. The slurry was attached to the silicon chip, and calcined at a temperature of 550°C for 5 hours to obtain a sensitive element. Weld the sensitive element on the sensor base, package it, and finally assemble t...
Embodiment 2
[0036] Take 85g of WO 3 , 1g of La 2 o 3 , 5g SiO 2 , 1 g TiO 2 , 1g of SnO 2 , 3g of Gd 2 o 3 , 1 g MoO 3 , 1 g of Nd 2 o 3 , 2g of Pt, add deionized water and grind to make a slurry. Among them: WO 3 Powder material with a particle size of 5-50nm, La 2 o 3 Powder material with a particle size of 5-60nm, SiO 2 Powder material with a particle size of 10-70nm, TiO 2 Powder material with a particle size of 5-60nm, SnO 2 Powder material with a particle size of 5-60nm, Gd 2 o 3 Powder materials with a particle size of 10-70nm, Pt powder materials with a particle size of 10-50nm, MoO 3 Powder material with a particle size of 10-70nm, Nd 2 o 3 Powder materials with a particle size of 10-70nm, and the ash content of each component of the sensitive material is not higher than 0.2%. Adhere the slurry on the silicon chip, and carry out calcination, the calcination temperature is 650°C, and the calcination time is 2 hours, and the sensitive element is obtained. Weld ...
Embodiment 3
[0038] Take 75g of WO 3 , 2g of La 2 o 3 , 8g SiO 2 , 3g TiO 2 , 5g of SnO 2 , 1g of Gd 2 o 3 , 2 g MoO 3 , 2g of Nd 2 o 3 , 2g of Pt, add deionized water and grind to make a slurry. Among them: WO 3 Powder material with a particle size of 5-25nm, La 2 o 3 Powder material with a particle size of 10-30nm, SiO 2 Powder material with a particle size of 10-40nm, TiO 2 Powder material with a particle size of 5-30nm, SnO 2 Powder material with a particle size of 5-30nm, Gd 2 o 3 Powder materials with a particle size of 10-40nm, Pt powder materials with a particle size of 10-25nm, MoO 3 Powder material with a particle size of 10-40nm, Nd 2 o 3 Powder materials with a particle size of 10-40nm, and the ash content of sensitive materials is not higher than 0.2%. Adhere the slurry on the silicon chip, and carry out calcination, the calcination temperature is 600°C, and the calcination time is 4 hours, and the sensitive element is obtained. Weld the sensitive element ...
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