Biaxial stretching/compression mode scanning electron microscope mechanical test device

Abstract

The invention relates to a biaxial stretching / compression mode scanning electron microscope mechanical test device belonging to an electromechanical material performance test instrument. The biaxial stretching / compression mode scanning electron microscope mechanical test device comprises a biaxial loading and transmission unit composed of a high-precision direct current servo motor, a three-level large-reduction-ratio reducing mechanism, a small-lead ball screw nut pair and a guide rail. With the adoption of the biaxial stretching / compression mode scanning electron microscope mechanical test device, precise application of load can be realized in a quasi-static mode at an extremely low velocity, a plurality of types of material performance test modes containing a uniaxial stretching / compression mode, a biaxial constant speed / variable speed synchronous stretching / compression mode, or a biaxial constant speed / variable speed asynchronous stretching / compression mode, and the like can be started by synchronization precision acquisition of four paths of load / displacement signals and combining a closed-loop control strategy taking a load, displacement or deformation signal as a feedback source, and drive units, transmission units and detection units of each shaft are independent and are not interfered with one another. The biaxial stretching / compression mode scanning electron microscope mechanical test device has a compact and exquisite structure and good compatibility with imaging instruments, such as a scanning electron microscope.

Description

[0001] technical field [0002] The invention relates to an electromechanical material performance testing instrument, in particular to a mechanical testing device under a biaxial tension / compression mode scanning electron microscope. Background technique [0003] As an important means of testing the mechanical properties of materials, biaxial tension mainly uses the method of applying loads in two directions at the same time to test non-uniform materials with large Poisson's ratio and anisotropy. Generally, multiple measurements are required in the test. Modes are available, such as biaxial constant tension ratio, constant elongation ratio, constant creep ratio and constant relaxation ratio, etc., and can be combined with load / displacement sensors and related algorithms to obtain elastic modulus, yield strength, and tensile strength , Poisson's ratio and other important mechanical parameters. Among them, elastic modulus, yield strength, tensile strength and other param...

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Problems solved by technology

[0005] To sum up, the device for testing the mechanical properties of biaxial tension / compression materials under the scanning electron microscope is still in its infancy, and the specific performance is as follows: in terms of structure, such instruments are mostly arranged in series through drive and transmission, often resulting in The size is large, and to a certain extent weakens the rigidity of the system; from the perspective of observation means, due to the limitation of the volume of the vacuum chamber of the scanning electron microscope, this type of instrument is not yet compatible with the structure of the scanning electron microscope, and is compatible with the scanning electron microscope. Vacuum compatibility and electromagnetic compatibility have not yet been determined

At the same time, due to the problem of the imaging principle, the optical microscope has the disadvantage of insufficient magnification, while the atomic force microscope has the disadvantage of too slow imaging speed. Both observation methods are difficult to study the effect of load changes on the mechanical behavior and damage mechanism of materials. law of influence

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