Lifting and delivering device for automatic wafer loading and unloading of graphite boat

Abstract

The invention relates to a lifting and delivering device for automatic wafer loading and unloading of a PECVD (Plasma Enhanced Chemical Vapor Deposition) graphite boat. The lifting and delivering device comprises a frame which is vertically placed and a transshipment wafer box used for temporarily storing silicon wafers, wherein the front surface of the frame is provided with a wafer box lifting mechanism used for driving the wafer box to slide up and down; one side of the frame is provided with a silicon wafer transshipment mechanism used for driving the transshipment wafer box to slide up and down, and one side of the silicon wafer transshipment mechanism is provided with a silicon wafer delivering mechanism for horizontally delivering the wafer box between the wafer box lifting mechanism and the silicon wafer transshipment mechanism; and the wafer box lifting mechanism, the silicon wafer transshipment mechanism and the silicon wafer transshipment mechanism form a first group of lifting and delivering devices, and the back of the frame is provided with a second group of lifting and delivering devices which are symmetrical to the first group of lifting and delivering devices. According to the invention, the whole lifting and delivering device can rapidly and accurately load the silicon wafers in the wafer box and unload the silicon wafers from the wafer box, the graphite boat does not need manual wafer loading and unloading after a PECVD process, the labour intensity and labour cost are reduced, and the automaticity and the production efficiency of a solar battery production line are improved.

Description

technical field [0001] The invention relates to the field of solar cell manufacturing, in particular to a lifting transfer device for automatic loading and unloading sheets of PECVD graphite boats. Background technique [0002] In the production process of crystalline silicon solar cells, it is necessary to prepare a layer of anti-reflection film on the surface of the silicon wafer. Now the commonly used process is to grow a layer of silicon nitride film on the surface of the silicon wafer by PECVD. After the PECVD process is completed, the silicon wafers need to be taken out from the graphite boat, and then put into the silk screen printing box for the silk screen printing process; after all the silicon wafers in the graphite boat are taken out, the non-reflective film silicon wafers that have completed the previous cleaning process need to be reinserted, which is Graphite boat manually loads and unloads sheets. Due to the weight of the graphite boat and the narrow gap bet...

AI Technical Summary

Problems solved by technology

Due to the weight of the graphite boat and the narrow gap between the sheets, manual loading and unloading of the sheets is labor-intensive and labor-intensive. At the same time, the debris rate is high and the production efficiency cannot be improved.

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