Universal control system for integrated circuit manufacturing equipment

Abstract

The invention provides a universal control system for integrated circuit manufacturing equipment. The universal control system comprises an application layer device, a logic layer device and a communication layer device, wherein the application layer device is used for receiving mainframe control commands from a factory mainframe and configuration information of a user; the logic layer device is used for receiving mainframe control commands and configuration information from the application layer device and generating task commands according to the configuration information and the mainframe control commands; and the communication layer device is used for receiving task commands of a hardware equipment control subsystem of the logic layer device, analyzing and packaging the task commands and sending the packaged task commands to hardware equipment so as to control the hardware equipment to execute corresponding tasks. According to the invention, the control system for the integrated circuit manufacturing equipment can be modularized, so that the coupling of all modules of the control system can be lowered, the readability, the maintainability and the reusability of codes can be improved, the replaceability of the equipment can be enhanced, and further, the workload for secondary development, the implementation difficulty and the maintenance cost of the control system for the integrated circuit manufacturing equipment can be lowered.

Description

Technical field [0001] The present invention relates to the field of computer application technology and the field of integrated circuit manufacturing equipment control, in particular to a general control system for integrated circuit manufacturing equipment. Background technique [0002] In the field of highly automated integrated circuit manufacturing equipment control, the main problem with software integration is that there are no standard factory communication protocols and equipment behavior control standards between different equipment suppliers. The factory communication protocols and equipment behavior control methods used by equipment suppliers are different from the integrated circuit manufacturing production lines, which makes integrated circuit manufacturers have to design their own software middleware to "connect", leading to a sharp increase in software integration costs problem. SEMI (Semiconductor Equipment and Materials Institute, International Association of I...

AI Technical Summary

Problems solved by technology

The factory communication protocols and equipment behavior control methods used by equipment suppliers are different from those of integrated circuit manufacturing production lines, which makes integrated circuit manufacturers have to design their own software middleware for "connection", resulting in a sharp increase in software integration costs question

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