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Method for measuring central thickness of reflecting type differential confocal lens

A differential confocal and thickness measurement technology, which is applied to measuring devices, instruments, and optical devices, can solve problems such as complex assembly and adjustment processes, and achieve the effects of reducing complexity, improving measurement accuracy, and achieving tomographic capabilities

Inactive Publication Date: 2012-09-19
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in this patent, the lens under test is placed in the converging beam, and the lens under test needs to be adjusted four-dimensionally during the measurement, so that its optical axis is completely consistent with the optical axis of the converging beam, and the assembly process is complicated.

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  • Method for measuring central thickness of reflecting type differential confocal lens
  • Method for measuring central thickness of reflecting type differential confocal lens
  • Method for measuring central thickness of reflecting type differential confocal lens

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] as attached figure 1 And attached figure 2 As shown, the method for measuring the central thickness of the reflective differential confocal lens, the measurement steps are:

[0043] (a) Start the measurement software in the main control computer 21, and input relevant parameters, which mainly include the radius of curvature r of the rear surface of the measured lens 5 2 =100.7134mm, air refractive index n 0 =1, the measured lens 5 refractive index n=1.5143 and the numerical aperture angle α of the measuring beam 6 0 =5.8°.

[0044] (b) Turn on the laser 20 , the light emitted by the laser 20 is transmitted through the optical fiber 19 to form the point light source 1 . The light emitted by the point light source 1 passes through the beam splitter 2 and the collimator lens 3 to form a parallel beam;

[0045] (c) Place the plane mirror 7 on the two-dimensional adjustment frame 26, adjust the plane mirror 7 by the two-dimensional adjustment frame 26, so that its surf...

Embodiment 2

[0054] The difference from Embodiment 1 is that the annular pupil 4 is added to block the paraxial light in the method of measuring the central thickness of the reflective differential confocal lens, and then the measurement of the central thickness of the measured lens 5 is completed. Due to the addition of the annular pupil 4, the measurement beam 6 forms a hollow measurement light cone, which will effectively reduce the influence of aberrations on the measurement results.

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Abstract

The invention belongs to the technical field of optical precision measurement, and relates to a method for measuring central thickness of a reflecting type differential confocal lens. According to the method, a vertex on the front surface and a vertex on the rear surface of the lens are precisely positioned by matching a differential confocal measuring method with a plane reflecting mirror, so that the central thickness of the lens is measured according to a ray tracing formula. The vertex on the front surface and the vertex on the rear surface of the lens are highly precisely focused and collimated for the first time by combining light beams emitted by the measured lens with a differential confocal technology, the assembling and adjusting difficulty of the measured lens is greatly reduced, and the method has the advantages of high measuring precision and high capacity of resisting environmental disturbance, and can be used for highly precisely detecting the central thickness of the lens.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement and can be used for non-contact high-precision measurement of lens center thickness. technical background [0002] In an optical system, a lens is one of the most basic and important components, and its optical performance will directly affect the overall performance of the system. Therefore, in order to ensure that the overall performance of the optical system meets the requirements, strict tolerance requirements will be imposed on the parameters of each lens used. Among all the parameters of the lens, the central thickness of the lens is one of the most basic and important parameters, and its processing accuracy will directly affect the comprehensive performance of the lens such as focal length and aberration, and then affect the performance of the entire optical system. And with the emergence of cutting-edge projects such as lithography machines and nuclear fusion optical...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/06
Inventor 赵维谦杨佳苗邱丽荣李佳邵荣君吴华玲
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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