Three-dimensional mirror object shape measurement system based on sinusoidal stripe projection

A technology of sinusoidal fringes and measuring systems, which is applied in the direction of measuring devices, instruments, and optical devices, etc., can solve the problems that the measurement accuracy cannot meet the high-precision requirements, the equipment is expensive, and the measurement range is small, so as to achieve online three-dimensional detection, structural Simple, anti-interference effect

Inactive Publication Date: 2012-10-10
BEIHANG UNIV
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Problems solved by technology

[0005] However, traditional 3D shape measurement methods such as time-of-flight, phase, and photogrammetry cannot meet the high-precision requirements of 3D shape measurement for mi

Method used

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  • Three-dimensional mirror object shape measurement system based on sinusoidal stripe projection
  • Three-dimensional mirror object shape measurement system based on sinusoidal stripe projection
  • Three-dimensional mirror object shape measurement system based on sinusoidal stripe projection

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Embodiment Construction

[0033] Such as figure 1 As shown, the present invention is based on a sinusoidal fringe projection-based mirror object three-dimensional shape measurement system, which consists of a computer system 1, a sinusoidal fringe projection system 2 based on an acousto-optic deflector, an image acquisition system 3, a fast positioning system 4, and a precision translation stage 5 composition. The position connection relationship between them is: the sinusoidal fringe projection system 2 based on the acousto-optic deflector is connected to the computer system 1 through the serial port data transmission line, and is controlled by the computer system 1 to tilt towards the measured surface of the mirror object on the precision translation stage 5 Sine stripes are projected at 45°; the image acquisition system 3 is connected to the computer system 1 through a super five-category network cable, and the position of the image acquisition system 3 is adjusted so that the focal plane of the obj...

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Abstract

A three-dimensional mirror object shape measurement system based on sinusoidal stripe projection mainly comprises a computer system, a sinusoidal stripe projection system based on an acousto-optic deflector, an image acquisition system, a quick positioning system and a precise translation stage. A computer controls the sinusoidal stripe projection system to project a plurality of sinusoidal stripes to a directly measured surface of a mirror object, the phase, the frequency and the brightness of each projected sinusoidal stripe are adjustable, then the image acquisition system acquires corresponding image information and transmits the image information to the computer system, the computer system processes the image information, accordingly, a phase image containing three-dimensional information of the object is obtained, and finally, three-dimensional information of the measured surface of the mirror object is obtained according to a phase and height mapping relation. The three-dimensional mirror object shape measurement system is mainly applied to three-dimensionally measuring shapes of micro-sized mirror objects, the measurement range is about 4.5mmX3mm, the resolution is superior to 5 micrometers, and three-dimensional point cloud space is 3.75 micrometers.

Description

technical field [0001] The invention relates to a three-dimensional shape measurement system of a mirror object based on sinusoidal fringe projection, and belongs to the field of optical three-dimensional shape measurement. Background technique [0002] With the development of science and technology, human observation of the material world is moving towards the micron and nanoscale, and the three-dimensional measurement technology is gradually expanding from large to small. Observation tools have higher resolution, and also require the ability to obtain depth information on the surface of the object, so as to completely and accurately reproduce the three-dimensional topography of the sample. The three-dimensional shape measurement of mirror objects has very important application value in many fields such as materials science, precision instruments, precision machining, biomedicine, etc., and has become a research hotspot and difficulty in the field of measurement. [0003] ...

Claims

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Application Information

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IPC IPC(8): G01B11/25
Inventor 赵慧洁姜宏志邹凯
Owner BEIHANG UNIV
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