Method for enhancing success rate of extracting transmission electron microscope sample prepared by focused ion beam

Abstract

The invention discloses a method for enhancing the success rate of extracting a transmission electron microscope sample prepared by a focused ion beam. According to the method, in the process of extracting the sample, when the sample is horizontally put at the bottom part of a groove left in sample preparation, a gasket with adjustable angle is cushioned below a chip so as to form a certain angle; the sample is adsorbed on a needlepoint of a glass needle by using the glass needle and is transferred to a sample carrier, therefore, the failure in sample extraction because the sample is horizontally put at the bottom part of the groove left in the sample preparation is avoided; the success rate of the sample extraction is enhanced; the cost is reduced; and the operation is easy and simple.

Description

technical field [0001] The invention relates to the technical field of microscopic detection, in particular to a method for improving the success rate of transmission electron microscope samples prepared by extracting focused ion beams. Background technique [0002] As an important tool of electron microscopy, Transmission Electron Microscope (TEM) can simultaneously analyze the microstructure, crystal structure, constituent elements, chemical bonding state, and electron distribution structure of micro-regions. It is a powerful tool for solid material analysis. One of the tools. With the continuous development of the semiconductor industry, the continuous improvement of technology, the continuous reduction of chip size, and the increasingly diversified, three-dimensional, and miniaturized growth of materials, the interfaces, strain states, strain relaxation and The subsequent formation of lattice mismatch dislocations, etc., provides a broad development space for the use of...

AI Technical Summary

Problems solved by technology

[0006] 1. The static electricity of the glass needle is insufficient;

[0007] 2. When the lens sample was prepared by the focused ion beam, the U-CUT section was not done well, so that the sample and the chip were not completely separated

[0008] The above problems will cause the sample to lie flat on the bottom of the groove left during the preparation, so that the glass needle cannot be approached, so that it cannot be extracted, and eventually the sample extraction fails

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