Micro-optical acceleration sensor integrated with grating piezoelectric modulation and detection method thereof

An acceleration sensor, micro-optical technology, applied in the direction of speed/acceleration/shock measurement, measurement of acceleration, instruments, etc., can solve the problems of low accuracy of micro-acceleration sensor, can not meet the needs of the development of military equipment, etc., to improve detection sensitivity, The effect of reducing circuit noise

Inactive Publication Date: 2012-10-31
ZHEJIANG UNIV
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Problems solved by technology

[0007] In addition, it has been reported in the literature that the application of micro-acceleration sensors and micro-gyroscopes to extended-range guided munitions (ERGM) can effect...

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  • Micro-optical acceleration sensor integrated with grating piezoelectric modulation and detection method thereof
  • Micro-optical acceleration sensor integrated with grating piezoelectric modulation and detection method thereof
  • Micro-optical acceleration sensor integrated with grating piezoelectric modulation and detection method thereof

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Embodiment Construction

[0046] like figure 1 Shown is the micro-optical acceleration sensor of the present invention, including a base 10, a housing 9 buckled upside down on the base 10, a MEMS sensing mechanism comprising a mass 4 and a cantilever beam 3 is arranged above the base 10, and the MEMS sensing mechanism is vertically Slidingly installed in the housing 9, a grating 2 is arranged above the MEMS sensing mechanism, and a ring-shaped piezoelectric ceramic part 5 is arranged on the side of the grating 2 facing the MEMS, and the piezoelectric ceramic part 5 and the grating 2 are fixed to each other. The inside of the housing 9 can slide vertically. A light source 1 and a photodetection module 6 are arranged above the grating 2 and on the top of the inner wall of the housing 9. The photodetection module 6 is connected to the signal processing module 7. The piezoelectric ceramic component 5 passes through two electrodes. It is connected with the piezoelectric driving module 8, and the piezoelectr...

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Abstract

The invention discloses a micro-optical acceleration sensor integrated with grating piezoelectric modulation and a detection method of the micro-optical acceleration sensor. The micro-optical acceleration sensor comprises a shell; light sources and gratings are sequentially arranged in the shell along a light path; a base, an MEMS (Micro-electromechanical System) sensing mechanism and a piezoelectric ceramic part are also arranged in the shell along the light path, wherein the MEMS sensing mechanism is arranged between the base and the gratings and is arranged in the shell in a sliding manner, the piezoelectric ceramic part is arranged between the grating and the MEMS sensing mechanism, and one surface of the piezoelectric ceramic part is fixed on the gratings; the MEMS sensing mechanism comprises a mass block and a cantilever beam connected with the mass block; and one surface of the mass block facing the gratings is a reflecting surface plated with a metallic aluminium film. The micro-optical acceleration sensor has the advantages that as the piezoelectric ceramic part is introduced as a modulator, the detection sensitivity of the sensor can be greatly increased; and by detecting two diffraction light intensity signals with different orders and adopting phase locking amplification and differential treatment, the circuit noise is reduced, and the measurement accuracy of a system is increased.

Description

technical field [0001] The invention relates to the field of micro-optical electro-mechanical system (MOEMS) acceleration sensors, in particular to a micro-optical acceleration sensor with integrated grating piezoelectric modulation and a method thereof. Background technique [0002] Micro-machined Acceleration Sensor (Micro-machined Acceleration Sensor) is one of the representative devices of MEMS. It has the characteristics of small size, light weight and easy integration. It is the core device of the micro-inertial measurement combination. As the performance of micromachined accelerometers improves, applications continue to move toward high precision. The micro-acceleration sensor is one of the key sensors required by weapons and equipment, and has broad military application prospects. [0003] There are many types of micro-mechanical acceleration sensors, and the development is also rapid. At present, micro-mechanical acceleration sensors are roughly divided into the fo...

Claims

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Application Information

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IPC IPC(8): G01P15/093
Inventor 侯昌伦
Owner ZHEJIANG UNIV
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