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Adhesive sheet

A technology of adhesive sheet and adhesive layer, which is applied in the direction of adhesive types, ester copolymer adhesives, adhesives, etc., can solve the problems of residual air bubbles, etc., and achieve the effect of preventing the mixing of air bubbles and reducing the light transmittance

Active Publication Date: 2012-10-31
KIMOTO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, although such a surface protection film is bonded on the surface facing the photoresist through an adhesive layer, when there is a step in a photomask or the like, bubbles remain in the area formed by the adhesive layer. Because of the problem of the level difference covered by the lamination layer (also known as entrapment of air bubbles), an adhesive layer that does not entrap air bubbles is being sought (see Patent Document 2)

Method used

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  • Adhesive sheet
  • Adhesive sheet

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Embodiment 1

[0060] Apply a coating solution for a release layer with the following composition on one surface of a transparent polymer film (Lumirror: TORAY) with a thickness of 6 μm by bar coating, and then heat it at 120° C. for 5 minutes to cure it to form a layer with a thickness of about 0.5μm release layer. Then, a coating solution for an adhesive layer of the following formulation was applied to the other surface, and dried to form an adhesive layer with a thickness of about 2 μm, thereby producing an adhesive sheet that can be used as a surface protection film. A 25-micrometer-thick polyethylene terephthalate release film (MRB: Mitsubishi Plastics Co., Ltd.) used for handling was attached to the adhesive layer.

[0061]

[0062] ・Ionizing radiation curable resin 33 parts

[0063] (DeSolite 7501: 50% solid content, JSR Corporation)

[0064] ·Silicone acrylate release agent 0.2 parts

[0065] (Silicone content 70%, solid content 100%)

[0066] · 4 parts of polyvalent unsaturat...

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PUM

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Abstract

Disclosed is an adhesive sheet comprising a base material and an adhesive layer formed on the base material, wherein the adhesive layer has a creep ratio of 2.5% or less, an elasticity change ratio of 73% or more and Martens hardness of 80 N / mm2 or less. When the adhesive sheet is compressed to convex parts in a material having concave parts and the convex parts repeatedly, the deformation occurring in the convex parts can be prevented and the reduction in light permeability caused by the deformation, i.e., whitening, can be prevented. Therefore, the adhesive sheet can be used suitably as a surface-protecting film for a photomask, which is used in the production of a printed wiring board or the like using a substrate having concave parts and the convex parts such as through holes formed thereon.

Description

technical field [0001] The present invention relates to a PSA sheet, particularly a PSA sheet capable of preventing a reduction in the light transmittance of an PSA layer even when strong pressure is repeatedly applied. Background technique [0002] Usually, a printed wiring board or a resin relief plate is produced by exposing a photomask (exposure original) in close contact with an adhesive photoresist such as a liquid photoresist. Therefore, when the photomask is peeled off from the photoresist after exposure, if no treatment is applied to the photomask surface in advance, a part of the photoresist will be caused to adhere to the photomask surface, Even if it is wiped, it remains on the photomask, which causes a problem of lowering the exposure accuracy. In view of such a situation, conventionally, a surface protective film having release properties is provided on a surface of a photomask facing a photoresist to prevent the photoresist from adhering to the photomask. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09J7/02C09J133/04G03F1/56C09J7/22C09J7/35G03F1/38
CPCG03F7/2014G03F1/38C09J2463/00C09J7/0242C09J2433/00C09J133/04C09J7/35C09J7/22C09J7/30C09J2203/00C09J2301/312
Inventor 松下武司长谷川刚栗岛进
Owner KIMOTO CO LTD