Optical path coupling alignment device and method based on sub-aperture division
A technology of alignment device and sub-aperture, applied in optics, optical components, instruments, etc., can solve the problems of large occupied space, complex control and complex structure, etc.
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[0039] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0040] Such as figure 1 As shown, the purpose of the optical path coupling alignment device based on sub-aperture division in the embodiment of the present invention is to align the light source on the first platform 8 with the sensor 3 based on sub-aperture division on the second platform 9 . The alignment device includes: a first tilting mirror 1, a second tilting mirror 2, a sensor 3 based on sub-aperture division, a drive control unit 4, a beam splitter 5, a first platform 8, a second platform 9, and a first optical system 6 and the second optical system 7; the first tilting mirror 1 and the first optical system 6 are located on the first platform 8; the second tilting mirror 2, a sensor 3 based on sub-aperture division, the drive control unit 4, the beam splitter 5 and the first The second optical system 7 is located on the second platf...
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