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Method for storing wafers

A technology of wafers and wafer cassettes, which is used in electrical components, semiconductor/solid-state device manufacturing, circuits, etc.

Inactive Publication Date: 2012-11-14
NAN YA TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Provide wafer box

Method used

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  • Method for storing wafers
  • Method for storing wafers
  • Method for storing wafers

Examples

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Embodiment Construction

[0023] Please refer to figure 2 and image 3 , a method for storing wafers according to an embodiment of the present invention is described as follows. Firstly, step 101 is performed to provide a wafer cassette. The wafer cassette 10 may include a cassette body 12 . The case body 12 has an opening and a cover 14 covering this opening. The wafer box 10 may be of the prior art, but a cover 14 may be used to cover the opening in a hermetic (or called airtight or airtight) manner, so that the wafer box 10 is in an airtight state. The wafer cassette 10 has a valve 18 for pumping. The valve 18 can be provided on the box body 12 or the cover 14 .

[0024] Then, step 102 is performed to place the wafer 20 into the wafer cassette 10 through the opening of the wafer cassette 10 . The wafer 20 may be a semi-finished product from a semiconductor device process and await subsequent processes. Wafer 20 may generally be carried by holder 22 . The wafer 20 and the holder 22 can be pl...

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PUM

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Abstract

The present invention relates to a method for storing wafers. The method comprises: placing a plurality of wafers into a wafer cassette box; hermetically sealing the wafer cassette box; and pumping down the wafer cassette box to vacuum for storing the wafers. Therefore, the wafers can be stored in the wafer cassette box in separation from the ambient air without filling nitrogen. The present invention also relates to a method for storing wafers, comprising: placing the wafers carried by a holder conveyed on a wafer conveyor into a pump-down chamber, wherein, the pump-down chamber encloses a section of the wafer conveyor; hermetically sealing and pumping down the pump-down chamber to vacuum, so as to store the wafers on the wafer conveyor. Therefore, during the process of manufacturing a semiconductor, the wafers carried by the holder can be directly stored on the wafer conveyor, thereby saving time and achieving convenience without filling the nitrogen, and reducing production cost.

Description

technical field [0001] The invention relates to a method for manufacturing semiconductor devices, in particular to a method for storing wafers between two semiconductor processes. Background technique [0002] In semiconductor process technology, the wafer process requires a very high degree of clean environment. Wafers to be processed or loaded onto or unloaded from a processing tool are typically flushed with oxygen and moisture-free ultra-pure nitrogen to remove microscopic contaminants and reduce native oxide growth on the silicon surface. In the waiting time (Q-time) between two processes, such as figure 1 As shown, wafers 2 are typically stored in wafer storage containers 4 by filling the container with an inert gas and maintaining a positive pressure greater than the ambient pressure outside the container to avoid particle contamination, moisture adsorption and oxidation problems. Wafers are transported (or transferred, conveyed, etc.) from one processing tool or de...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677H01L21/673
CPCH01L21/67393
Inventor 谢明灯陈逸男刘献文
Owner NAN YA TECH