Flow rate measuring device and flow rate controller

Abstract

The invention provides a flow rate measuring device (10) and a flow rate control device (100), and accuracy of flow rate measurement can be improved without compactness being damaged. A flow rate measuring device (10) includes a fluid resistance member (3) through which measurement target fluid flows; an upstream side pressure sensor (21) configured to measure pressure on an upstream side of the fluid resistance member (3) from a change of electrical resistance of a resistive element (2B) attached to a pressure sensitive surface onto which the target fluid is introduced, and also to measure a temperature of the pressure sensitive surface from a temperature-dependent change of the electrical resistance of the resistive element (2B); a temperature detection member (8) is configured to measure the position of the temperature of the target flow which flows through the fluid resistance member (3); and a flow rate calculation part (9) that calculates a flow rate of the target fluid based on the pressure measured by the upstream side pressure sensor (21), pressure-flow rate characteristics of the fluid resistance member, the temperature of the pressure sensor measured by the upstream side pressure sensor (21), and the temperature of target fluid in the fluid resistance member (3) measured by the temperature detection member (8).

Description

technical field [0001] The present invention relates to a flow measurement device for measuring the flow rate of, for example, a material gas used in semiconductor processing based on pressure, and a flow control device using the flow measurement device. Background technique [0002] The flow measuring device and the flow control device of the above kind are provided with a fluid resistance member, and the flow rate is calculated from the pressure before and after the fluid resistance member (in semiconductor processing, etc., when a vacuum chamber is connected downstream, etc., the flow rate is calculated). low, the flow rate can be calculated with high accuracy using only the upstream pressure). [0003] There is known a device in which a common main body unit is formed as an integrated block, and the fluid resistance member and the pressure sensor are mounted on the main body unit to form an integral body. road. [0004] In order to calculate the flow rate more accurate...

AI Technical Summary

Problems solved by technology

[0011] At this time, if the temperature is measured at one place as in the past, the temperature does not necessarily represent the actual temperature in the pressure sensor or the temperature in the fluid resistance member, which may cause measurement errors.

However, if the temperature sensor is simply added, it will not be able to meet the requirements of compactness, etc.

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