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Online detection method and device for laser injury in optical component body

A technology for optical components and laser damage, which is used in measurement devices, material analysis by optical means, scientific instruments, etc., to achieve excellent resolution, eliminate noise, and improve accuracy.

Inactive Publication Date: 2012-12-26
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
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  • Application Information

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Problems solved by technology

Analyzing the above four methods, plasma flash, photothermal method and photoacoustic method can only be applied to the judgment of surface damage
In vivo damage can only be determined by the scattering method

Method used

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  • Online detection method and device for laser injury in optical component body
  • Online detection method and device for laser injury in optical component body
  • Online detection method and device for laser injury in optical component body

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Embodiment Construction

[0020] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0021] see first figure 1 , figure 1 It is a block diagram of the damage detection device in the optical element body of the present invention. It can be seen from the figure that the laser damage detection device in the optical element body of the present invention includes a HeNe continuous laser 1, and along the output light direction of the HeNe continuous laser 1 is a dichroic mirror 3 and a focusing lens 4 in sequence. And the optical element 5 to be measured, the described dichroic mirror 3 is 45 ° with the optical path, and the Nd:YAG laser 2 is set in the 45 ° direction of the described dichroic mirror 3, and the laser light emitted by the Nd: YAG laser 2 passes through the described After being reflected by the dichroic mirror 3, the laser light output by the HeN...

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Abstract

The invention discloses an online detection method and device for laser injury in an optical component body, which are applied to detection of injury in a component due to irradiation of a Nd:YAG pulse laser to an optical component. A HeNe continuous laser is used for illuminating a test region in the component, and a large depth-to-field and high resolution imaging device is designed for imaging the test region on a detector, and the test region in the component body is monitored from the side surface so that the influence of scattered light on the surface is weakened, and whether the injury is caused is judged by comparing images of the test region before and after irradiation of the Nd:YAG pulse laser. Meanwhile, in order to avoid the optical path change caused by movement of a sample, an automatic control technology is adopted for integrally moving the injury detection device for compensating the optical path change, thus out-of-focus is eliminated, and accuracy of injury detection is improved. The invention can be used for online observing the production and development process of the injury in the component, is suitable for online monitoring of injury in all kinds of optical components, and is higher in sensitivity and reliability.

Description

technical field [0001] The invention relates to laser damage detection, in particular to an online detection method and device for laser damage in an optical element body. Background technique [0002] With the improvement of laser flux and the deepening of ultraviolet laser research, the anti-destructive ability of optical components restricts the development of lasers and research in the ultraviolet field. The occurrence and growth of laser damage will lead to a decrease in beam quality and luminous flux, and will also cause damage to subsequent components. Therefore, an important indicator for judging the quality of components in high-power laser systems is the laser damage threshold of optical components. [0003] Laser damage to optical components can occur on the anterior or posterior surface or in vivo. For example, the damage of components such as laser thin film and fused silica glass first occurs on the surface; the damage of KDP / DKDP crystal first occurs in the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/17
Inventor 胡国行赵元安李大伟刘晓凤柯立公
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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