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Discharging chamber with micro-channel structure and gas laser device

A gas laser and discharge cavity technology, applied in gas laser parts, lasers, laser parts and other directions, can solve problems such as adverse effects on laser performance, reduce arcing phenomenon, prevent vortex flow, and increase discharge stability Effect

Active Publication Date: 2014-09-17
RAINBOW SOURCE LASER RSLASER
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] The technical problem to be solved by the present invention is to prevent the formation of vortex air flow in the discharge chamber of the gas laser, so as to avoid its adverse effect on the performance of the laser

Method used

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  • Discharging chamber with micro-channel structure and gas laser device
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  • Discharging chamber with micro-channel structure and gas laser device

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Embodiment Construction

[0028] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0029] The invention improves the discharge chamber structure of the traditional gas laser, and designs a micro-channel structure in it, so that the air flow in the high-pressure area is led to the vortex area, and the gas in the vortex area is blown into the main air flow , so as to take away the exhaust gas and heat accumulated in the vortex area.

[0030] There are a discharge electrode and a fan in the discharge chamber of the excimer laser of the present invention, and the discharge electrode includes a cathode and an anode. When the excimer laser is working, a voltage is applied to the cathode, thereby forming a discharge region between the cathode and the anode. The fan in the discharge chamber drives the airflow ...

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Abstract

The invention discloses a discharging chamber with a micro-channel structure and a gas laser device. The discharging chamber is internally provided with a discharging electrode and a draught fan; and the draught fan drives gas in the discharging chamber to flow through the discharging electrode, so as to form a main gas flow. Flow guide plates are arranged at the two sides of the discharging electrode and a micro-channel is arranged on each flow guide plate; and an outlet of the micro-channel faces to a gap between each flow guide plate and the discharging electrode. The discharging chamber further comprises a pre-ionizing device and is supported among the flow guide plates and the discharging electrode. According to the discharging chamber with the micro-channel structure and the gas laser device, the micro-channel structure is formed in the discharging chamber of an excimer laser device, thereby preventing the generation of a vortex air flow, reducing an arc phenomenon generated on the side face of the discharging electrode, increasing the discharging stability, improving the laser energy and prolonging the service life of a pre-ionizing electrode.

Description

technical field [0001] The invention relates to the technical field of gas lasers, in particular to a discharge chamber of a gas laser, in particular to a discharge chamber with a micro-channel structure and a corresponding gas laser. The invention is particularly suitable for the occasions requiring excimer gas lasers with good flow field state in the discharge area. Background technique [0002] Gas lasers, especially excimer lasers, are the best laser sources for lithography. A typical excimer laser is mainly composed of a discharge cavity and a high-voltage pulse source, and the discharge cavity is mainly composed of a discharge electrode, a gas circulation system and a heat dissipation system. [0003] When an excimer laser works at a high repetition rate, it is necessary to form a high-speed airflow in the discharge area to take away the exhaust gas that has been discharged, and to continuously replenish the discharge cavity with fresh working gas to ensure the qualit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S3/036H01S3/03H01S3/22
Inventor 刘斌丁金滨张立佳赵江山周翊王宇
Owner RAINBOW SOURCE LASER RSLASER
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