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Polycrystalline silicon production process

A production process, polysilicon technology, applied in the direction of silicon, etc., can solve the problems of complex equipment and process flow, energy consumption reduction, etc., and achieve the effect of reducing operating costs, reducing one-time investment and operating costs

Active Publication Date: 2013-01-02
巴彦淖尔聚光硅业有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Cold hydrogenation was originally a process used to prepare trichlorosilane in the early stage of the silane method, and it was directly introduced into the improved Siemens method. Although compared with the traditional improved Siemens method, its energy consumption can be greatly reduced, but due to two different systems Integration between, so there is still room for further optimization
[0004] The invention patent with the notification number CN101372336 discloses a polysilicon production method, which recovers, purifies, and condenses the reduction tail gas in the production process, but still uses the dry recovery technology, which needs to be rinsed with liquid silicon tetrachloride In addition to impurities, processes such as absorbents, adsorbents, and adsorption and desorption are also required, so the equipment and process are relatively complicated

Method used

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  • Polycrystalline silicon production process

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Embodiment 1

[0031] Such as figure 1 As shown, in the polysilicon production process of the present invention, industrial silicon powder reacts with silicon tetrachloride and hydrogen in the reactor in the hydrochlorination process to generate hydrogen and mixed chlorosilanes of trichlorosilane and silicon tetrachloride, which are passed through low temperature Condensation Condensate trichlorosilane and silicon tetrachloride, hydrogen is sent to the purifier, and the condensed mixed chlorosilane of trichlorosilane and silicon tetrachloride is sent to the primary rectification process, and the working pressure of the purifier is 1.5Mpa ;

[0032] The trichlorosilane and silicon tetrachloride mixed chlorosilanes from the hydrochlorination process are separated in the primary rectification process to remove high and low boilers, and the silicon tetrachloride is sent to the hydrochlorination process for recycling. The purity produced by the primary rectification is 99.99% The above high-...

Embodiment 2

[0038] Such as figure 1 As shown, in the polysilicon production process of the present invention, industrial silicon powder reacts with silicon tetrachloride and hydrogen in the reactor in the hydrochlorination process to generate hydrogen and mixed chlorosilanes of trichlorosilane and silicon tetrachloride, which are passed through low temperature Condensation Condensate trichlorosilane and silicon tetrachloride, send hydrogen to the purifier, and send the mixed chlorosilane of trichlorosilane and silicon tetrachloride to the primary rectification process, and the working pressure of the purifier is 2.0Mpa ;

[0039]The trichlorosilane and silicon tetrachloride mixed chlorosilanes from the hydrochlorination process are separated in the primary rectification process to remove high and low boilers, and the silicon tetrachloride is sent to the hydrochlorination process for recycling. The purity produced by the primary rectification is 99.99% The above high-purity trichlorosilan...

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Abstract

The invention provides a polycrystalline silicon production process capable of simplifying process, reducing energy consumption and saving production cost. A chlorine hydride technique is used to substitute a synthetic process and a cold hydrogenation process in a traditional production system. A condenser and a purifier are used in the invention to substitute a dry recovery system in a traditional production system. A general circulation established between a hydrochlorination process and a reduction process can utilize hydrogen produced in the reduction as a supplementary gas for hydrochlorination, so that the operation cost is reduced. As the hydrochlorination and hydrogen reduction general circulation are realized, only a set of hydrogen compressor needs to be configured after the condenser, so as to save energy; and because of the one-stage compression, the number of one-time configured compressors and standby machines thereof is greatly reduced, thereby reducing one-time investment and operating costs by more than 10%.

Description

technical field [0001] The invention relates to a polysilicon production process, in particular to a polysilicon production system which can simplify the process, reduce energy consumption and save costs. Background technique [0002] At present, more than 80% of polysilicon enterprises at home and abroad adopt the improved Siemens method, but due to the low conversion rate and high energy consumption of silicon tetrachloride in the thermal hydrogenation process, some polysilicon manufacturing enterprises have replaced the traditional one with cold hydrogenation process. The thermal hydrogenation of chlorosilane is used to realize the closed cycle of chlorosilane in the production system, and to achieve the purpose of saving energy and reducing consumption. [0003] Cold hydrogenation was originally a process used to prepare trichlorosilane in the early stage of the silane method, and it was directly introduced into the improved Siemens method. Although compared with the tra...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/03
Inventor 齐林喜
Owner 巴彦淖尔聚光硅业有限公司
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