Hartmann sensor consisting of spherical micro lens array and spherical detector
A technology of microlens arrays and detectors, which is applied in the direction of instruments, measuring devices, scientific instruments, etc., can solve the problems of difficult processing and assembly of short focal length microlens arrays, high price of photodetectors with large target surfaces, etc., and achieve the expansion of dynamic range , short focal length, and high temporal resolution
Inactive Publication Date: 2014-04-02
CHANGCHUN UNIV OF SCI & TECH
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In addition, the processing and assembly of short-focus microlens arrays are more difficult, and the price of photodetectors with large target surfaces is higher
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[0009] The Hartmann sensor composed of microlens arrays and spherical detectors arranged on a spherical surface of the present invention is composed of an optical path narrowing system 1, a microlens array, a photodetector and a wavefront processor 2. The optical path narrowing system 1 and the microlens array Coaxial distribution, the photosensitive surface of the photodetector is located at the focal plane of the microlens array, the photodetector is electrically connected with the wave front processor 2, and the wave front processor 2 is acted by a computer. Described microlens array is spherical arrangement microlens array 3, and described photodetector is spherical detector 4, see figure 1 As shown, the spherical surface arrangement microlens array 3, the spherical surface detector 4 are concentric and located at point O, the optical axis of each microlens in the spherical arrangement microlens array 3 all intersects point O, and the spherical arrangement microlens array 3...
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The invention discloses a Hartmann sensor consisting of a spherical micro lens array and a spherical detectorand belongs to the technical field of optical testers. The measurement precision is reduced because the dynamic range of the conventional Hartmann sensor is expanded. According to the Hartmann sensor, an optical path beam contraction system and a micro lens array are coaxially distributed; a photosensitive surface of a photoelectric detector is positioned on a focal plane of the micro lens array; the photoelectric detector is electrically connected with a wavefront treatment machine; the micro lens array is a spherical micro lens array; the photoelectric detector is a spherical detector; the spherical micro lens array and a spherical surface of the spherical detector are concentric and are positioned at a point O; the optical axis of each micro lens in the spherical micro lens array intersects with the point O; and moreover, a coupling relation between the curvature radius r1 of the spherical micro lens array and the curvature radius r2 of the spherical detector is FORMULA, wherein n is a refractive index of each micro lens; theta is an included angle between the micro lens coaxial with the spherical micro lens array and the micro lens adjacent to the first micro lens; and f' is a focal length of each micro lens.
Description
technical field [0001] The invention relates to a Hartmann sensor composed of a microlens array arranged on a spherical surface and a spherical detector, belonging to the technical field of optical testing instruments. Background technique [0002] The Hartmann sensor is a sensor that can measure dynamically, has low requirements on the environment, and has high measurement accuracy. It is mainly used in various wavefront measuring instruments. The existing Hartmann sensor is composed of an optical path narrowing system, a microlens array, a photodetector and a wavefront processor. The beam shrinking system of the optical path is coaxially distributed with the microlens array. The photosensitive surface of the photodetector is located at the focal plane of the microlens array. The signal output by the photodetector is transmitted to the wavefront processor, and the real-time Wavefront restored data. Dynamic range is a very important characteristic parameter in designing an...
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IPC IPC(8): G01J9/00
Inventor 刘妍付跃刚刘智颖马辰昊
Owner CHANGCHUN UNIV OF SCI & TECH