Method for reducing non-linearity during measurement of a physical parameter and electronic circuit for implementing the same
一种物理参数、电子电路的技术,应用在利用改变欧姆电阻的流体压力测量、测量力、测量装置等方向,达到减小非线性效应的效果
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[0028] Since the various components of sensor electronics interface circuits with differential capacitors are well known in the art, they will not be explained in full detail in the following description. Emphasis is mainly placed on the method of measuring physical parameters by means of an electronic circuit which supplies a digital measurement signal at an output with a reduction of the non-linear effects of the digital-to-analog converter.
[0029] figure 1 A simplified diagram of various components of an electronic interface circuit 1 for a capacitive sensor 2 according to the invention is shown. In this embodiment, a three-axis capacitive MEMS sensor 2 with one mass is connected to the electronic circuit 1 , however, it is entirely conceivable to connect a three-axis sensor or a single-axis sensor with three moving masses. Such a capacitive sensor thus consists of three pairs of capacitors C1X, C2X, C1Y, C2Y, C1Z, C2Z. The two capacitors of each pair are connected diff...
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