Supercharge Your Innovation With Domain-Expert AI Agents!

Method of studying a sample in an ETEM

A sample and sample chamber technology, applied in the field of sample research in ETEM, can solve problems such as limiting analysis methods, and achieve the effect of small drift

Active Publication Date: 2013-02-06
FEI COMPANY
View PDF9 Cites 6 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, such sample holders severely limit the available analytical methods

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method of studying a sample in an ETEM
  • Method of studying a sample in an ETEM
  • Method of studying a sample in an ETEM

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0026] figure 1 An environmental transmission electron microscope (ETEM) according to the invention is schematically shown.

[0027] The ETEM comprises a housing 120 which is evacuated by a vacuum pump 122 through a vacuum line 121 . A high voltage cable 109 connects the electron source 101 with high voltage electronics (not shown). The electron source generates an electron beam along axis 100 . A collimating coil 102 straightens the electron beam, an aperture 103 confines the electron beam and a condenser lens 104 forms an image of the electron source. Objective lens 105 then forms a parallel electron beam at said sample position 111 . Note that the sample can be irradiated with a focused electron beam that is rastered over the sample. This is named scanning transmission electron microscopy. The sample (not shown) is placed on the sample position 111 by a side-entry sample holder 112 . Lens 106 then forms a magnified image of the sample on fluorescent screen 107 which c...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a method of studying a sample in the active atmosphere in an Environmental Transmission Electron Microscope (ETEM). Such a study is used to study a reaction (chemical or physical) of a sample with a gas. Of special interest is the chemical reactions of a gas and a catalyst, as well as the physical change (phase change) of, for example, the growth of a whisker from the gas phase growing on a solid. Prior art studies involve introducing the sample on a side-entry sample holder in the sample chamber of an ETEM, heating the sample to a required temperature, wait for the sample to settle to a drift-free position and then expose the sample to a pressure of, for example, 10 mbar of heated, reactive gas. Because the temperature distribution of the sample holder is a function of the temperature and pressure of gas, the temperature distribution over the sample holder will slightly change when exposing the sample holder to the gas, as a result of which the sample will drift. To avoid, or at least minimize, the drift, the invention involves the exposure to inert gas at a desired temperature before exchanging the inert gas to the active gas. The invention is also of applicable to optical, X-ray or scanning probe microscopy.

Description

technical field [0001] The invention relates to a method for studying a sample in an easily evacuable sample chamber, at least part of which is carried out in a reactive atmosphere with controlled pressure and temperature, as a result of which the sample exhibits a chemical reaction or a physical change , the sample chamber is equipped with a sample holder for holding the sample in a sample position, the sample holder is equipped with means for controlling the temperature of the sample to a temperature different from the temperature of the sample chamber , a portion of the sample holder has the temperature of the sample chamber and a portion of the sample holder has the temperature of the sample, the thermal gradient over the sample holder is influenced by gas pressure, gas temperature and gas flow , as a result of which the sample position varies with gas pressure, gas temperature and gas flow, [0002] The study included the following sequential steps: [0003] - introduci...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01N23/04G01N1/28
CPCH01J2237/2003H01J2237/28H01J37/26H01J2237/2002G01Q30/12H01J2237/2001H01J37/20B82Y35/00
Inventor S.J.P.科宁斯S.库贾瓦P.H.F.特龙佩纳尔斯
Owner FEI COMPANY
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com