Glass substrate end surface evaluation method, glass substrate end surface processing method, and glass substrate
A glass substrate and evaluation method technology, which is applied to metal processing equipment, manufacturing tools, grinding machine parts, etc., can solve problems such as gaps, cracks, and burns on the end face of the glass substrate, achieving good quality and preventing burns.
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Embodiment 1
[0092] Using a metal bond grinding wheel with a grain size of 450-600, the peripheral speed of 470-3000m / min is controlled so that the grinding load is constant, and the end surface Z of the glass substrate G of 1000mm×1000mm is roughly ground. Next, use an elastic resin bonded grinding wheel with a particle size of No. 600 as a finishing grinding wheel, and control the peripheral speed so that the grinding load is constant in the range of 470 to 3000 m / min, and finish grinding the end surface Z into a mirror surface.
[0093] figure 2 The photographic image shown is the glass substrate G processed by the chamfering wheel 10 , and is a photographic image obtained by photographing the region of the processing center of the end face Z of the glass substrate G with a laser microscope 14 .
[0094] image 3 is true figure 2 The image data of the image data is subjected to black-and-white binarization processing, and the concave portion existing in the end face Z is regarded as...
Embodiment 2
[0097] Using a metal bond grinding wheel with a grain size of 450-600, the peripheral speed of 470-3000m / min is controlled so that the grinding load is constant, and the end surface Z of the glass substrate G of 1000mm×1000mm is roughly ground. Next, use an elastic resin bond grinding wheel with a particle size of No. 220 as a fine grinding wheel, and control the peripheral speed so that the grinding load is constant in the range of 470 to 3000 m / min, and finish grinding the end surface Z into a mirror surface.
[0098] Figure 4 The photographic image shown is the glass substrate G processed by the chamfering wheel 10 , and is a photographic image obtained by photographing the region of the processing center of the end face Z of the glass substrate G with a laser microscope 14 .
[0099] Figure 5 is true Figure 4 The black-and-white binarization process is carried out on the image data of the end face Z, and the photo image represented by color separation is made by using...
Embodiment 3
[0102] Using a metal bond grinding wheel with a grain size of 450-600, the peripheral speed of 470-3000m / min is controlled so that the grinding load is constant, and the end surface Z of the glass substrate G of 1000mm×1000mm is roughly ground. Next, use an elastic resin bonded grinding wheel with a particle size of No. 320 as a fine grinding wheel, control the peripheral speed so that the grinding load is constant within the range of 470-3000m / min, and finish grinding the end surface Z into a mirror surface .
[0103] Image 6 The photographic image shown is the glass substrate G processed by the chamfering wheel 10 , and is a photographic image obtained by photographing the region of the processing center of the end face Z of the glass substrate G with a laser microscope 14 .
[0104] Figure 7 is true Image 6 The image data of the image data is subjected to black-and-white binarization processing, and the concave portion existing on the end face Z is regarded as a white...
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Abstract
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