Calibration device of ultra-far ultraviolet detector

Abstract

The invention provides a calibration device of an ultra-far ultraviolet detector. The calibration device comprises a light source, a converging swing mirror unit, an ultraviolet monochrometer unit, a detector unit and a pressure difference unit, wherein the converging swing mirror unit comprises a converging swing mirror which comprises swing mirrors and a rotation displacement platform, the swing mirrors are two concave reflectors bonded by non-reflecting surfaces, central axes of the reflectors of the swing mirrors are coincide, a 30nm-200nm reflecting film is coated on a reflecting surface A of one reflector, and a 60nm-200nm reflecting film is coated on a reflecting surface B of the other reflector. The detector comprises a standard detector and a detector to be detected. The calibration device can correct spectral radiance parameters of the detector in 30nm-200nm. The calibration device is small in size, has sufficient ports, has unique design on ultra ultraviolet and far ultraviolet radiation calibration and removal of high-level spectra, and improves accuracy of the ultra ultraviolet and far ultraviolet radiation calibration.

Description

technical field [0001] The invention relates to a calibration device for an extreme ultraviolet detector, which belongs to the technical field of optical testing. Background technique [0002] The ultraviolet band can be broadly divided into vacuum ultraviolet band (10nm~200nm) and non-vacuum ultraviolet band (200nm~400nm) according to whether it can propagate in the atmosphere. The ultraviolet band below 200nm will be strongly absorbed in the air, so if you want to perform optical metrology in the vacuum band, you must use a vacuum chamber to create a vacuum ultraviolet band measurement test environment. In the vacuum ultraviolet band, it is subdivided into far ultraviolet (80nm-200nm) and extreme ultraviolet band (10nm-80nm), and the boundaries between the two bands are relatively vague. The extreme ultraviolet and extreme ultraviolet radiation calibration standard device involved in the present invention covers the 30nm-200nm band. [0003] The radiation characteristics...

AI Technical Summary

Problems solved by technology

[0005] In the domestic NSRL and Metrology Institute jointly established the extreme ultraviolet and far ultraviolet calibration device based on synchrotron radiation, the main focus is on the calibration of standard parts, the interface method and calibration time are not flexible enough, the coverage of the band range is not complete, and the environmental testing capability It is not yet available, and it is impossible to calibrate the extreme ultraviolet detectors at any time. It is urgent to establish a set of extreme ultraviolet and extreme ultraviolet detector calibration systems that can meet the actual application requirements in the national defense system and even in China, so as to fill the domestic gap.

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