Calibration device of ultra-far ultraviolet detector

A calibration device and detector technology, which is applied in the field of optical testing, can solve problems such as interface mode, calibration time is not flexible enough, extreme ultraviolet detector cannot be calibrated, and the range of wavelength bands covered is incomplete, so as to reduce the complexity of the system and use Flexible, Accurate Effects

Active Publication Date: 2013-03-27
BEIJING ZHENXING METROLOGY & TEST INST
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Problems solved by technology

[0005] In the domestic NSRL and Metrology Institute jointly established the extreme ultraviolet and far ultraviolet calibration device based on synchrotron radiation, the main focus is on the calibration of standard parts, the interface method and calibration time are not flexible enough, the coverage of the band range is not complete, and the environmental te

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  • Calibration device of ultra-far ultraviolet detector
  • Calibration device of ultra-far ultraviolet detector
  • Calibration device of ultra-far ultraviolet detector

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Embodiment Construction

[0032] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. In the following description, for purposes of explanation and not limitation, specific details are set forth in order to provide a thorough understanding of the invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced in other embodiments that depart from these specific details.

[0033] It should be noted here that, in order to avoid obscuring the present invention due to unnecessary details, only the device structure and / or processing steps closely related to the solution according to the present invention are shown in the drawings, and the steps related to the present invention are omitted. Invent other details that don't really matter.

[0034] Embodiments of the present invention will be described below with reference to the drawings.

[0035] Embodiments of the present invention will ...

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Abstract

The invention provides a calibration device of an ultra-far ultraviolet detector. The calibration device comprises a light source, a converging swing mirror unit, an ultraviolet monochrometer unit, a detector unit and a pressure difference unit, wherein the converging swing mirror unit comprises a converging swing mirror which comprises swing mirrors and a rotation displacement platform, the swing mirrors are two concave reflectors bonded by non-reflecting surfaces, central axes of the reflectors of the swing mirrors are coincide, a 30nm-200nm reflecting film is coated on a reflecting surface A of one reflector, and a 60nm-200nm reflecting film is coated on a reflecting surface B of the other reflector. The detector comprises a standard detector and a detector to be detected. The calibration device can correct spectral radiance parameters of the detector in 30nm-200nm. The calibration device is small in size, has sufficient ports, has unique design on ultra ultraviolet and far ultraviolet radiation calibration and removal of high-level spectra, and improves accuracy of the ultra ultraviolet and far ultraviolet radiation calibration.

Description

technical field [0001] The invention relates to a calibration device for an extreme ultraviolet detector, which belongs to the technical field of optical testing. Background technique [0002] The ultraviolet band can be broadly divided into vacuum ultraviolet band (10nm~200nm) and non-vacuum ultraviolet band (200nm~400nm) according to whether it can propagate in the atmosphere. The ultraviolet band below 200nm will be strongly absorbed in the air, so if you want to perform optical metrology in the vacuum band, you must use a vacuum chamber to create a vacuum ultraviolet band measurement test environment. In the vacuum ultraviolet band, it is subdivided into far ultraviolet (80nm-200nm) and extreme ultraviolet band (10nm-80nm), and the boundaries between the two bands are relatively vague. The extreme ultraviolet and extreme ultraviolet radiation calibration standard device involved in the present invention covers the 30nm-200nm band. [0003] The radiation characteristics...

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Application Information

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IPC IPC(8): G01M11/00G01J3/10
Inventor 王加朋孙红胜宋春晖张玉国李世伟张虎任小婉
Owner BEIJING ZHENXING METROLOGY & TEST INST
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